Hollow Relay Member for Substrate Chamber Pressure Isolation
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Solution Overview
Problem
The existing substrate processing apparatuses face challenges in precisely measuring the pressure inside the process chamber due to interference from the exhaust chamber pressure, especially when the deposition shield's position varies, creating gaps that affect the accuracy of pressure gauges installed outside the chamber.
Innovation Solution
A substrate processing apparatus is designed with a hollow relay member that communicates between the process chamber and a pressure gauge, ensuring a higher conductance for gas flowing from the process chamber compared to the exhaust chamber, thereby isolating the pressure measurement from exhaust chamber influences and enhancing accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the deposition shield is arranged near the inner wall of the chamber to prevent deposit adhesion, then the protection against dust generation is improved, but a space gap is created between the deposition shield and the inner wall that allows exhaust chamber pressure to influence process chamber pressure measurements
Solution Approach 1:
A hollow relay member is introduced as an intermediary component between the process chamber and the pressure gauge. This relay member penetrates the deposition shield and provides a dedicated gas flow path that isolates the pressure measurement from the exhaust chamber, allowing accurate pressure readings while maintaining the deposition shield's protective function
Solution Approach 2:
The gas flow path is segmented into separate channels: one path through the hollow relay member for pressure measurement and another path through the gap between the relay member and chamber wall for exhaust evacuation. This segmentation ensures that exhaust chamber pressure does not contaminate the process chamber pressure measurement
2Adaptability or versatility
If the deposition shield position is changed to adapt to different processes, then the adaptability of the apparatus is improved, but the distance between the deposition shield and inner wall varies creating measurement instability
Solution Approach 1:
The hollow relay member serves as a stable intermediary structure that maintains a consistent gas flow path regardless of deposition shield position. By fixing the relay member's position and using it as the primary measurement interface, the system achieves stable pressure measurements even when the deposition shield is repositioned for different processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for precise measurement and control of the process chamber pressure, reducing deviations and improving the accuracy of pressure readings, ensuring consistent process conditions.
Implementation Method 1
The relay member is configured to receive a first gas flowing from the chamber into the relay member. The first gas has a first conductance. The first conductance is greater than a second conductance of a second gas flowing from the exhaust chamber into a gap between the relay member and the side wall of the chamber.
Data Source
AI summary
A substrate processing apparatus includes a chamber including a process chamber for performing a process on a substrate by a gas introduced thereto and an exhaust chamber for evacuating the gas in the process chamber, a shield member for separating the process chamber from the exhaust chamber provided in at least a part of a neighborhood of a side wall of the chamber, and a hollow relay member penetrating through the shield member for communicating the chamber with a pipe connected to a pressure gauge outside the chamber. The relay member is configured to receive a first gas flowing from the chamber into the relay member. The first gas has a first conductance. The first conductance is greater than a second conductance of a second gas flowing from the exhaust chamber into a gap between the relay member and the side wall of the chamber.