Movable Relay Pressure Port for Deposition Shield Chambers
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In substrate processing apparatuses, accurately measuring pressure in the processing room is challenging due to limited space for conventional sleeves when a large deposition shield is used, making it difficult to install pressure gauges at desired locations.
Innovation Solution
A substrate processing apparatus with a hollow relay member connected to a pipe outside the chamber, capable of being driven horizontally, which communicates with the processing room through a hole in the shield member when the shield reaches an upper position, allowing for pressure measurement within the processing room.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a large deposition shield is used to separate the processing room and exhaust room, then the separation effectiveness is improved, but the space available for installing conventional pressure gauge sleeves is reduced
Solution Approach 1:
The pressure measurement system is segmented into two independent components: a movable relay member that can be positioned horizontally, and a fixed pressure gauge. This segmentation allows the relay member to access different locations along the deposition shield while the pressure gauge remains stationary in a fixed installation position, effectively resolving the space constraint problem.
Solution Approach 2:
The relay member is designed to move horizontally along the deposition shield, adding a dimensional degree of freedom to the pressure measurement system. This horizontal movement capability allows multiple measurement points to be accessed without requiring vertical or radial space that would conflict with the deposition shield structure.
2Measurement precision
If multiple pressure gauges are installed to measure pressure at different locations, then measurement coverage is improved, but device complexity increases
Solution Approach 1:
The relay member serves multiple functions: it acts as a mechanical relay to transmit pressure from different locations along the deposition shield, and simultaneously serves as a positioning mechanism to select which location's pressure is being measured. This multi-functionality eliminates the need for multiple separate pressure gauges, reducing device complexity while maintaining comprehensive measurement coverage.
3Adaptability or versatility
If a relay member is made movable horizontally to access different positions, then measurement flexibility is improved, but sealing reliability deteriorates
Solution Approach 1:
The relay member acts as an intermediary component between the processing environment and the fixed pressure gauge. By introducing this intermediate movable element, the system achieves both measurement flexibility at different positions and reliable sealing, as the relay member can be designed with appropriate sealing mechanisms at its movement interfaces while maintaining pressure isolation.
Data Source
AI summary
A substrate processing apparatus includes a chamber including a processing room for processing of a substrate using an introduced gas and an exhaust room for exhausting the gas in the processing room, a shield member provided near a side wall of the chamber to separate the processing room and the exhaust room and including a hole allowing the processing room and the exhaust room to communicate with each other, the shield member being driven in a vertical direction, and a hollow relay member connected to a pipe connected to an instrument outside the chamber and configured to be driven in a horizontal direction. When the shield member reaches an upper position, the relay member is driven inwardly of the chamber to be connected to the shield member at its inward end to allow the processing room and the pipe to communicate with each other through the hole.