Remote Controlled Exhaust Damper Valve for Semiconductor Substrate Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses require manual and periodic adjustment of exhaust damper valves to maintain negative pressure, leading to production defects and increased costs due to excessive gas exhaust, and pose safety risks for operators due to high installation locations.
Innovation Solution
A substrate processing apparatus with an exhaust damper valve mechanism that can be remotely controlled from a safe operational height, automatically adjusting its opening degree to maintain constant pressure and prevent chemical substance leaks, thereby enhancing worker safety and reducing production costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the damper valve is manually adjusted to maintain pressure, then the pressure inside the gas box can be kept at a safe level, but the adjustment work becomes dangerous due to high installation location
Solution Approach 1:
The patent replaces the manual mechanical adjustment system with an automated control system. A motor-driven mechanism automatically adjusts the damper valve opening degree based on pressure sensor feedback, eliminating the need for operators to manually access high installation locations and adjust valves, thus resolving the contradiction between maintaining reliable pressure control and ensuring operational safety
Solution Approach 2:
The patent implements a feedback control system where pressure sensors continuously monitor the pressure inside the gas box and transfer chamber, and the controller automatically adjusts the damper valve opening degree based on this feedback to maintain pressure within the safe range. This automated feedback loop eliminates manual intervention while ensuring reliable pressure maintenance
2Stability of the object's composition
If the damper valve is excessively opened to suppress pressure drop, then the pressure stability is improved, but the amount of exhaust gas increases leading to higher production cost
Solution Approach 1:
The patent employs a dynamic adjustment mechanism where the damper valve opening degree is continuously and automatically adjusted based on real-time pressure conditions. Instead of maintaining a fixed excessive opening, the system dynamically optimizes the opening degree to maintain pressure stability while minimizing exhaust gas flow, thereby resolving the contradiction between pressure stability and energy loss
Solution Approach 2:
The patent changes the control parameter from a fixed manual setting to a dynamically variable automated control. The controller adjusts the damper valve opening degree parameter in response to pressure sensor feedback, enabling the system to maintain pressure stability with minimal exhaust gas flow, thus resolving the contradiction between pressure stability and exhaust gas loss
3Reliability
If periodic manual adjustment is performed, then the pressure can be maintained, but production defects occur when safety circuit activates due to pressure drop
Solution Approach 1:
The patent implements continuous automated pressure monitoring and adjustment, replacing periodic manual adjustments. The pressure sensor continuously monitors pressure conditions and the controller continuously adjusts the damper valve to maintain pressure within the safe range, ensuring uninterrupted chemical substance supply and preventing production defects, thus resolving the contradiction between reliable pressure maintenance and production continuity
Solution Approach 2:
The system performs self-adjustment through automated control. The pressure sensor and controller work together to automatically maintain pressure without requiring external manual intervention, ensuring continuous safe operation and preventing production interruptions, thereby resolving the contradiction between pressure reliability and production continuity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The remote control of exhaust damper valves ensures consistent pressure in the processing system, preventing production failures and reducing energy consumption, while improving worker safety by eliminating the need for hazardous manual adjustments.
Implementation Method 1
a heater configured to heat the substrate in the process container
Implementation Method 2
an exhaust damper valve including an opening degree variable mechanism installed in at least one selected from the group of the heater chamber exhaust duct, the gas box exhaust duct, the scavenger exhaust duct, and the local exhaust duct, which are connected to a factory exhaust duct kept at a negative pressure
Data Source
AI summary
There is installed a configuration that includes a process container; a heater chamber exhaust duct configured to discharge an air that has cooled a space at which a heater is installed; a gas box exhaust duct configured to suck and discharge an atmosphere in a gas box; a scavenger exhaust duct configured to suck and discharge an atmosphere in a scavenger; a local exhaust duct configured to suck and discharge an atmosphere in a local exhaust port installed in a transfer chamber; an exhaust damper valve including an opening degree variable mechanism installed in at least one selected from the group of the heater chamber exhaust duct, the gas box exhaust duct, the scavenger exhaust duct, and the local exhaust duct; and a controller configured to remotely control an opening degree of the exhaust damper valve.