Remote Plasma Source Structure for Easier Ignition and Gas Decomposition
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Solution Overview
Problem
Existing plasma processing technologies face challenges in facilitating plasma ignition and improving gas decomposition efficiency, particularly when using inductively coupled plasma (ICP) type remote sources, which often result in a narrow stable plasma range and difficulty in ignition.
Innovation Solution
A plasma source configuration that includes a plasma generator with a dielectric window and a protruding portion containing a conductor, which protrudes close to the dielectric window and has a gas hole to inject reducing gas, enhancing plasma ignition and gas decomposition efficiency by concentrating energy and radicals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an ICP type remote source is used, then plasma processing can be performed, but plasma ignition is difficult and the stable plasma range is narrow
Solution Approach 1:
The protruding portion with gas hole is positioned in advance near the dielectric window to create a preliminary gas injection path. This preliminary arrangement of gas flow before the main plasma generation area facilitates easier plasma ignition by pre-positioning the fuel source near the electromagnetic wave entry point.
Solution Approach 2:
The protruding portion creates a localized region with different gas flow characteristics near the dielectric window. By concentrating gas injection at this specific location rather than uniformly across the chamber, the plasma ignition process is enhanced in this local area, making ignition easier while maintaining overall plasma stability.
2Productivity
If an ICP type remote source is used, then plasma processing can be performed, but gas decomposition efficiency is insufficient
Solution Approach 1:
The protruding portion creates a localized high-energy region near the dielectric window where electromagnetic waves first enter the plasma generation chamber. Gas injected through the gas hole in the protruding portion is immediately exposed to strong electromagnetic fields, enhancing local gas decomposition efficiency without compromising overall plasma stability.
Solution Approach 2:
By positioning the gas hole in the protruding portion near the dielectric window, gas decomposition is initiated earlier in the plasma generation process. This preliminary decomposition action occurs before the gas reaches the main plasma bulk, improving overall decomposition efficiency while maintaining stable plasma conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed configuration facilitates easier plasma ignition and improves the efficiency of gas decomposition and radical generation, leading to more effective plasma processing with reduced substrate damage.
Implementation Method 1
a dielectric window disposed on the first wall to block the opening and configured to transmit electromagnetic waves to the plasma generating space
Implementation Method 2
a protruding portion disposed on the second wall, protruding from the second wall to be close to the dielectric window, and containing a conductor at least partially
Implementation Method 3
a plasma generator including a first wall having an opening and a second wall facing the first wall, and forming a plasma generating space
Implementation Method 4
improving gas decomposition efficiency
Data Source
AI summary
A plasma source comprising: a plasma generator including a first wall having an opening and a second wall facing the first wall, and forming a plasma generating space; a dielectric window disposed on the first wall to block the opening and configured to transmit electromagnetic waves to the plasma generating space; and a protruding portion disposed on the second wall, protruding from the second wall to be close to the dielectric window, and containing a conductor at least partially. The protruding portion has a gas hole that opens toward the dielectric window.