Remote Plasma Tube Layout for Lower RF Cost and Stable Plasma
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Solution Overview
Problem
Conventional plasma processing systems using multiple RF sources for different plasma generation parts are expensive due to high costs of RF delivery components, and anodized aluminum coatings in remote plasma generators degrade quickly, leading to particulate generation and unstable plasma performance, necessitating costly replacements.
Innovation Solution
A remote plasma system with isolated plasma tubes and capacitive elements, utilizing existing RF generators for both chamber and remote plasma source operations, and incorporating magnetic cores and coolant loops for efficient plasma generation without ferrite cores, allowing for field replaceable components and improved plasma stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple RF sources are used to generate plasma in different parts of the processing chamber, then plasma processing capability is improved, but system cost increases due to expensive RF delivery components
Solution Approach 1:
The patent implements a single RF source that can operate in multiple modes: capacitive coupling mode for chamber plasma generation and inductive coupling mode for remote plasma source generation. This multi-functional design eliminates the need for separate RF sources and their associated expensive delivery components, while maintaining the ability to perform both in-chamber and remote plasma processing
Solution Approach 2:
The patent combines the functions of multiple RF sources into a single unified RF generation system. The RF source is coupled to both the processing chamber (via RF generator 171 to chamber lid 123) and the remote plasma source (via RF source 150 to coil 202), merging what would traditionally require separate independent RF systems into one integrated solution
2Reliability
If anodized aluminum coating is used to protect aluminum interior walls, then protection is provided, but the coating degrades quickly leading to particulate generation and unstable plasma performance
Solution Approach 1:
The patent employs a composite protective system consisting of a nickel coating layer applied over the aluminum interior walls of the remote plasma source, with an additional fluorinated polymer coating layer over the nickel. This multi-layer composite structure provides superior protection against plasma degradation compared to single-layer anodized aluminum, extending component lifetime and maintaining stable plasma performance
Solution Approach 2:
The fluorinated polymer coating creates a chemically inert barrier between the reactive plasma environment and the aluminum substrate. This inert protective layer prevents surface reactions and degradation that would otherwise occur with direct plasma exposure, eliminating particulate generation from coating failure
3Device complexity
If remote plasma generator is formed as a complete system, then integration is achieved, but components cannot be replaced individually leading to waste and expense
Solution Approach 1:
The patent divides the remote plasma source into separable modular components: the plasma tube assembly (including tubes 204, 205 and associated coatings) can be independently removed and replaced from the main housing (200, 201). This segmentation allows individual component replacement rather than requiring replacement of the entire remote plasma generator system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces costs by reusing existing RF generators, extends component lifetime, and maintains stable plasma performance by minimizing degradation and particulate generation, enhancing wafer deposition/etch rates and film uniformity.
Implementation Method 1
a first capacitive element coupled across a first DC break... configured to cause the resonating circuit to be substantially at or near resonance at the excitation signal frequency
Implementation Method 2
generating a plasma within the first tube and the second tube based on the excitation signal
Implementation Method 3
a first magnetic core is surrounding a portion of the first tube proximate the first isolation component, a second magnetic core is surrounding a portion of the first tube proximate the second isolation component
Data Source
AI summary
Embodiments are directed to a remote plasma system. In an example, a remote plasma system includes a first tube, a second tube, a first isolation component coupled between a first end of the first tube and a first end of the second tube, a second isolation component coupled between a second end of the first tube and a second end of the second tube, and a first capacitive element coupled to the first isolation component. In one example, the second tube and the first tube together can have a circular or oval shape. In one example, a first magnetic core is surrounding a portion of the first tube proximate the first isolation component, a second magnetic core is surrounding a portion of the first tube proximate the second isolation component, a third magnetic core is surrounding a portion of the second tube proximate the first isolation component, and a fourth magnetic core is surrounding a portion of the second tube proximate the second isolation component.