Remote Turbomolecular Pump Control for On-the-Fly Specification Changes

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Solution Overview

Problem

The complexity of semiconductor manufacturing processes and the increase in the number of chambers per apparatus have led to a significant workload for users and field service engineers in changing the operating specifications of turbomolecular pumps, necessitating manual intervention and device attachment for specification changes.

Innovation Solution

A vacuum pump system with a remote controller that allows for remote control of turbomolecular pumps, enabling specification changes without stopping the pump operation, using a remote signal receiving means to adjust settings via a specification changing device such as a heater or cooling means.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If manual intervention is used to change pump specifications, then specification changes can be made, but the workload of users and field service engineers increases significantly

Engineering Contradiction:

Improvespecification change capabilityVSAvoidworkload of users and field service engineers

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The patent replaces the manual mechanical process of detaching and attaching specification changing devices with an automated control system. The controller receives control signals (electrical/ digital) and automatically adjusts pump operating specifications by controlling the specification changing device, eliminating the need for manual physical intervention and reducing workload.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The pump system performs self-adjustment of its operating specifications through automated control. When control signals are received, the system automatically modifies its own operating parameters without requiring external manual intervention, enabling the system to serve itself in terms of specification changes.

Inventive Principle:

Principle #25Self-service

2Adaptability or versatility

If the pump operation is stopped to change specifications, then specification changes can be made, but productivity decreases

Engineering Contradiction:

Improvespecification change capabilityVSAvoidpump operation continuity

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent enables dynamic specification changes during pump operation. The control system allows operating specifications to be modified while the pump continues to run, making the specification changing process adaptive and flexible rather than static and interruptive, thus maintaining productivity.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent ensures continuous pump operation during specification changes. The useful action of gas exhaustion continues uninterrupted while the controller adjusts operating parameters, eliminating downtime and maintaining continuous productivity throughout the specification change process.

Inventive Principle:

Principle #20Continuity of useful action

3Reliability

If multiple backup pumps are prepared for different specifications, then pump availability for different processes is ensured, but inventory space and cost increase

Engineering Contradiction:

Improvepump availability for different processesVSAvoidinventory of backup pumps

Core Design Contradiction:

ReliabilityVSQuantity of substance

Solution Approach 1:

The patent makes a single pump versatile by enabling it to operate at multiple different specifications through automated control. The pump can be dynamically adjusted to meet different process requirements, replacing the need for multiple specialized pumps and reducing inventory needs while maintaining reliability for various processes.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces the workload of users and field service engineers by allowing remote specification changes, improving efficiency and reducing the need for manual intervention.

Implementation Method 1

A heater for heating the base portion and a water-cooled tube for cooling the base portion are provided at the outer circumference of the base portion

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 2

a water-cooled tube for cooling the base portion... When the controller sends an ON command signal to the solenoid valve, the solenoid valve opens so that cooling water flows through the water-cooled tube

Methodology Applied

Scientific EffectHeat exchange: Heat Exchanger

Data Source

PatentUS12510090B2Vacuum pump, vacuum pump controller, and remote controller

Publication Date: 2025.12.30 EDWARDS JAPAN

AI summary

A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the turbomolecular pump 100. The controller 200 includes a remote signal receiving means that receives a command signal from a remote controller 300, which remotely controls the turbomolecular pump 100, and changes a setting relating to an operating specification of the turbomolecular pump 100 on the basis of the command signal received by the remote signal receiving means.