Remote Refill Vessel Heating for Continuous Precursor Delivery
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Solution Overview
Problem
Semiconductor manufacturing processes face downtime and quality excursions due to the need to frequently service and replace chemical precursor delivery vessels, which are limited by size and require phase changes that can lead to clogging and inefficiencies.
Innovation Solution
A remote refill system where a delivery vessel on a substrate processing platform is coupled to a remote refill vessel via a chemical delivery line, allowing for phase changes of the chemical (e.g., from solid to liquid or gas) to facilitate continuous operation, using heating and cooling devices to maintain the chemical in a transportable phase and prevent solidification, and an accumulator to ensure consistent delivery to the reaction chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If delivery vessels are made progressively larger to reduce the need to service and change them, then the frequency of vessel replacement is reduced, but the vessels eventually empty and still require swapping out requiring down-time and possibly quality or safety excursions
Solution Approach 1:
The system divides the chemical storage function into two separate components: a large remote refill vessel for bulk storage and a smaller delivery vessel for active use. The remote refill vessel remains stationary and is refilled periodically, while the delivery vessel is automatically refilled from it through a fluid communication line, eliminating the need for manual vessel changes and associated downtime.
Solution Approach 2:
A remote refill vessel acts as an intermediary between bulk chemical storage and the delivery vessel. It serves as a buffer reservoir that automatically refills the delivery vessel through fluid communication, mediating the transfer of chemical precursor without requiring manual intervention or vessel replacement.
2Productivity
If phase changes are used to transport chemical precursors, then delivery to the reaction chamber is enabled, but clogging and inefficiencies occur during phase changes
Solution Approach 1:
The system replaces mechanical phase change processes with a direct liquid transfer mechanism. The chemical precursor is maintained in liquid phase throughout the delivery system using controlled pressure and temperature, eliminating the need for phase changes and associated clogging problems while maintaining reliable chemical delivery to the reaction chamber.
Solution Approach 2:
The system controls pressure and temperature parameters to maintain the chemical precursor in a stable liquid phase throughout the delivery system. By adjusting these parameters, the system prevents unwanted phase changes that would cause clogging, ensuring reliable and efficient chemical delivery without the inefficiencies associated with phase transitions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system reduces downtime, labor, and safety risks by enabling continuous operation with larger chemical capacities, minimizing the need for vessel replacement and maintaining high-quality substrate processing by preventing particle formation and ensuring consistent chemical flow.
Implementation Method 1
heating the first chemical delivery line to a first temperature equal to or above a phase change temperature of the chemical
Implementation Method 2
changing the chemical in the remote refill vessel to a second phase
Implementation Method 3
Changing the phase of the chemical may further comprise melting the chemical by applying heat to the chemical
Implementation Method 4
cooling the delivery vessel to a second temperature to return the chemical to the first phase
Data Source
AI summary
The current disclosure relates to example method, system and apparatus for coupling a delivery vessel disposed at a first location on a substrate processing platform to a remote refill vessel disposed in a second location remote from the substrate processing platform via a first chemical delivery line, storing a chemical in the remote refill vessel in a first phase, changing the chemical in the remote refill vessel to a second phase, transporting the chemical in the second phase, to the delivery vessel via the first chemical delivery line, heating the first chemical delivery line to a first temperature equal to or above a phase change temperature of the chemical, and coupling the delivery vessel to an accumulator via a second chemical delivery line.