Remote Solid Refill Chamber for Semiconductor Processing
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Solution Overview
Problem
Current semiconductor processing systems require frequent replacement and refilling of delivery vessels, leading to downtime and potential quality or safety issues due to the limited size of these vessels, which restricts the continuous operation of chemical vapor deposition and atomic layer deposition processes.
Innovation Solution
A remote refill system is introduced, where a delivery vessel on a substrate processing platform is coupled to a remote refill vessel located remotely, allowing for continuous chemical supply by maintaining a temperature gradient within the delivery vessel to control the phase change of chemicals, preventing condensation and clogging, and using a thermal break to manage temperature differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of moving object
If delivery vessels are made progressively larger to reduce the need to service and change out delivery vessels, then the duration of continuous operation is improved, but the volume of the delivery vessel increases requiring more space and resources
Solution Approach 1:
The system is divided into two separate vessels: a remote refill vessel that is replenished periodically and a delivery vessel that is continuously operated. This segmentation allows the delivery vessel to maintain a smaller, manageable volume while achieving extended operation duration through continuous refilling from the remote vessel.
Solution Approach 2:
A refill line acts as an intermediary connection between the remote refill vessel and the delivery vessel, enabling continuous chemical supply without requiring the delivery vessel to be completely emptied or replaced. This intermediary mechanism allows the delivery vessel to operate continuously with smaller volume.
2Productivity
If delivery vessels are made progressively larger to reduce the need to service and change out delivery vessels, then productivity is improved, but device complexity increases due to larger vessel handling requirements
Solution Approach 1:
By segmenting the system into a remote refill vessel and a delivery vessel connected by a refill line, the complexity of handling large vessels is reduced. The delivery vessel remains small and simple to handle, while the remote refill vessel can be replenished independently, simplifying overall system operation.
Solution Approach 2:
The system enables self-service refilling where the delivery vessel can be continuously replenished from the remote refill vessel without requiring manual intervention or complex handling procedures. This automated refilling process improves productivity while keeping device complexity low.
3Quantity of substance
If chemicals are stored in solid phase in the delivery vessel, then the quantity of substance that can be stored increases, but the chemical cannot be transported to the reaction chamber for deposition processes
Solution Approach 1:
The system utilizes phase transitions to store chemicals in solid phase in the remote refill vessel for high quantity storage, then transitions them to gas phase during transport through the refill line, and finally deposits them onto the delivery vessel. This phase transition mechanism enables both high storage capacity and ease of transport.
Solution Approach 2:
The refill line uses pneumatic principles to transport chemical vapor from the remote refill vessel to the delivery vessel. The chemical is vaporized and transported as gas, then condensed and deposited in the delivery vessel, enabling easy transport while maintaining high storage quantity capability.
4Ease of operation
If a temperature gradient is maintained in the delivery vessel to prevent condensation and clogging, then the ease of operation is improved, but the use of energy increases due to heating requirements
Solution Approach 1:
Instead of heating the entire delivery vessel uniformly, the system applies local heating only at specific locations where condensation is most likely to occur. This localized heating approach maintains ease of operation by preventing condensation and clogging while minimizing energy consumption compared to uniform heating.
Solution Approach 2:
The system dynamically adjusts temperature parameters at different locations within the delivery vessel based on operational conditions. By changing temperature parameters locally rather than globally, the system maintains ease of operation while reducing overall energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces the need for frequent vessel replacements, minimizes downtime, and ensures a consistent chemical supply, enhancing the efficiency and reliability of semiconductor processing by maintaining chemicals in a vapor phase and facilitating continuous operation.
Implementation Method 1
controlling a heating device disposed at a top portion of the delivery vessel
Implementation Method 2
controlling a cooling device disposed at a bottom portion of the delivery vessel
Implementation Method 3
providing a thermal break between the top portion of the delivery vessel and the bottom portion of the delivery vessel
Implementation Method 4
changing the chemical in the remote refill vessel to a second phase, transporting the chemical in the second phase
Implementation Method 5
solidifying the chemical within the inner volume at least at a bottom surface of the delivery vessel
Data Source
AI summary
Various examples of the present disclosure relate to methods, systems, and apparatus for coupling a delivery vessel disposed at a first location on a substrate processing platform to a remote refill vessel disposed in a second location remote from the substrate processing platform, storing a chemical in the remote refill vessel in a first phase, changing the chemical in the remote refill vessel to a second phase, transporting the chemical in the second phase, to the delivery vessel, maintaining a temperature gradient within an inner volume of the delivery vessel, and returning the chemical to the first phase within the inner volume.