Removable Bell Jar for Inductively Coupled Plasma Processing
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Solution Overview
Problem
In inductively coupled plasma processing apparatuses, the accumulation of reaction products on the bell jar's inner surface leads to decreased productivity due to the need for frequent cleaning and reconditioning, which disrupts the antenna-plasma coupling and requires lengthy resetting of processing conditions.
Innovation Solution
A processing apparatus design featuring a first partitioning member with a removable second partitioning member (bell jar) that can be detached without removing the matching device, allowing for maintenance without disrupting the antenna-plasma coupling, using a seal member and a pressing ring to ensure sealing and prevent damage during removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the bell jar is removed for cleaning and maintenance, then the accumulation of reaction products is eliminated, but the matching device must be removed and reattached, causing changes in antenna-plasma coupling and requiring lengthy resetting of processing conditions
Solution Approach 1:
The bell jar is designed as a separable component that can be removed independently from the matching device. The mounting structure includes a mounting table with positioning protrusions and grooves, allowing the bell jar to be detached for cleaning without disturbing the matching device positioned above it. This segmentation enables maintenance of the bell jar while preserving the antenna-plasma coupling configuration.
Solution Approach 2:
The bell jar is extracted as a removable component from the overall processing chamber structure. By designing the bell jar with specific mounting features (protrusions fitting into grooves on the mounting table), it can be taken out for cleaning and maintenance while leaving the matching device and antenna system intact, thus avoiding the need to recondition the plasma coupling.
2Ease of manufacture
If the matching device is removed and reattached after bell jar maintenance, then the bell jar can be cleaned, but the antenna-plasma coupling state changes requiring reconditioning
Solution Approach 1:
The system is segmented into the bell jar (lower component) and matching device (upper component) with clear spatial separation. The bell jar mounts on the mounting table while the matching device positions above it, allowing independent access to the bell jar for maintenance without disturbing the matching device, thus preserving processing efficiency.
3Ease of repair
If the bell jar is made removable for easy cleaning, then maintenance time is reduced, but the sealing and positioning precision may be compromised
Solution Approach 1:
The bell jar is segmented as a removable component with specific mounting features. Positioning protrusions on the bell jar fit into corresponding grooves on the mounting table, providing precise positioning when attached while allowing easy removal for cleaning. This segmented design with mechanical positioning features maintains precision despite removability.
Solution Approach 2:
The bell jar is extracted as a maintainable component with dedicated mounting and positioning features. The protrusion-groove mechanism allows the bell jar to be taken out for cleaning while ensuring precise repositioning, balancing ease of maintenance with positioning accuracy.
Data Source
AI summary
A processing apparatus includes a substrate supporting unit that supports a substrate in a processing space in which the substrate is processed, a first partitioning member that includes a ceiling portion having an opening and partitions the processing space from an outer space, and a second partitioning member that is attached to the first partitioning member so as to close the opening and partition the processing space from the outer space together with the first partitioning member. The second partitioning member is attached to the first partitioning member so that the second partitioning member is removable from the first partitioning member by moving the second partitioning member toward a space which a lower surface of the ceiling portion faces.