Removable Cover for Plasma Cleaning Surface Isolation

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Solution Overview

Problem

Conventional plasma cleaning treatments struggle to achieve high cleanliness levels due to contamination from objects with varying surface contamination levels, risking contamination of the plasma cleaning device and requiring manual cleaning of subassemblies and packing materials.

Innovation Solution

An object with a removable cover is designed to separate surfaces with different contamination levels, allowing the plasma cleaning device to clean only the lower-contamination surface while keeping the higher-contamination surface isolated, preventing contamination of the device and reducing manual cleaning steps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional plasma cleaning treatment is applied to objects with different contamination levels, then the cleaning process can be performed, but the plasma cleaning device becomes contaminated and requires manual cleaning of subassemblies and packing material

Engineering Contradiction:
Improvecleanliness levelVSAvoidcontamination of plasma cleaning device
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The object is divided into multiple parts with different contamination levels. The first part (object proper) has lower contamination and is suitable for plasma cleaning, while the second part (packing material or subassemblies) has higher contamination and is excluded from the plasma cleaning chamber using a cover or separate containment, preventing contamination spread to the device

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The highly contaminated second part is extracted or separated from the plasma cleaning process. A removable cover or barrier is used to exclude the high-contamination packing material from the plasma cleaning chamber, allowing the plasma treatment to proceed on the object without exposing the device to harmful contaminants

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If manual cleaning of subassemblies and packing material is performed separately, then high cleanliness levels can be achieved, but the process time increases significantly

Engineering Contradiction:
Improvecleanliness levelVSAvoidcycle time for disassemble, clean and assemble
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The object structure itself facilitates the cleaning process by allowing the plasma cleaning device to effectively clean the first part while the second part is automatically excluded. The removable cover design enables automatic separation of cleanable and non-cleanable areas, reducing the need for time-consuming manual intervention

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The object is prepared in advance with a structure that accommodates differential contamination levels. The removable cover is designed to be in place before plasma cleaning, pre-configuring the system to protect sensitive areas and allowing the plasma process to proceed without interruption for manual cleaning

Inventive Principle:
Principle #10Preliminary action

3Reliability

If the object is disassembled and reassembled multiple times for cleaning, then contamination risk is reduced, but the number of handling steps increases and new contamination risks arise

Engineering Contradiction:
Improvecontamination riskVSAvoidnumber of handling steps
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The object is segmented into a first part that requires plasma cleaning and a second part that does not, with a removable cover providing the separation. This segmentation allows the cleaning process to proceed without full disassembly, reducing handling steps while maintaining contamination control

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A removable cover (flexible barrier) is used to separate areas with different contamination levels during the plasma cleaning process. This flexible shielding approach allows the object to remain assembled while protecting sensitive areas, eliminating the need for disassembly and reassembly operations

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the risk of contamination for the plasma cleaning device and the object, streamlining the cleaning process by minimizing the number of handling steps and ensuring higher cleanliness without exposing the device to high-contamination surfaces.

Implementation Method 1

Such an energetic plasma may be created while ionizing a low pressure gas phase

Methodology Applied
Scientific EffectIonization: Ionisation

Implementation Method 2

an energetic plasma created from gaseous species

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 3

The energetic, ionic gaseous species react with impurities and contaminants on the surface area of the object to be cleaned, often producing gaseous products

Methodology Applied
Scientific EffectChemical reaction: Chemical Bonding

Implementation Method 4

The energetic species also clean the surface area by collision with the surface area, knocking off the impurities and contaminants from the surface area

Methodology Applied
Scientific EffectCollision: Impact Force

Data Source

PatentUS8780322B2Object with an improved suitability for a plasma cleaning treatment
Publication Date: 2014.07.15 ASML NETHERLANDS BV
  • US8780322B2 patent drawing
  • US8780322B2 patent drawing
  • US8780322B2 patent drawing

AI summary

An object suitable for a plasma cleaning treatment in a plasma cleaning device, the object including a first outer surface area; a second outer surface area, wherein the object is constructed and arranged to cooperate with a removable cover such that the cover is connectable to the object to cover the second outer surface area, and wherein the object connected with the removable cover is adapted to be cleaned in the plasma cleaning device such that the plasma cleaning device is not exposed to particles of the second outer surface area and wherein the first outer surface area is cleaned in the plasma cleaning device.