Removable Electrostatic Chuck Fastening Assembly
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional electrostatic chucks (ESCs) face challenges due to their welded integrated structure, which makes them difficult to maintain, costly, and prone to electrical performance issues, especially in environments with radio frequency signals, and the AlSiC ceramic material used in the base support impairs electrical performance and is hard to replace.
Innovation Solution
An ESC design featuring a removably fixed chuck using a fastening assembly with a pressure ring and screws, allowing for easy disassembly and replacement, eliminating the need for welding and reducing material variability, thus improving electrical stability and processability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a welded integrated structure is used for the ESC ceramic part, then the structural strength is improved, but the ease of repair deteriorates
Solution Approach 1:
The ESC ceramic part is divided into multiple independent components: the chuck functional part, the base support, and the intermediate welded material part. These segments are connected through a removable fastening assembly rather than permanent welding, enabling individual replacement of damaged components while maintaining overall structural integrity.
2Stability of the object's composition
If welding is used to connect the chuck functional part and base support, then the structural integrity is improved, but the manufacturing complexity increases
Solution Approach 1:
The structure is segmented into distinct parts that can be manufactured separately using appropriate processes for each material type, then assembled together. This avoids the complexity of welding dissimilar materials while maintaining structural integrity through the fastening assembly.
Solution Approach 2:
The intermediate welded material part serves as an intermediary component between the chuck functional part and base support. This intermediary element facilitates the connection between different ceramic materials and the fastening assembly, simplifying the overall manufacturing process by providing a standardized interface.
3Strength
If AlSiC ceramic material is used for the base support, then the strength is improved, but the electrical performance deteriorates
Solution Approach 1:
Different regions of the ESC structure use different materials optimized for their specific functions. The base support uses AlSiC ceramic for mechanical strength where electrical performance is less critical, while the chuck functional part uses AlN ceramic for regions requiring both strength and electrical performance. This localized material selection optimizes overall system performance.
Data Source
AI summary
An electrostatic chuck includes a support assembly including a base, a chuck placed at the base and configured to carry a workpiece, and a fastening assembly configured to removably fix the chuck at the base.