Removable Member for Immersion Lithography
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Solution Overview
Problem
In immersion lithographic apparatuses, removable members used to modify surface properties deteriorate under the influence of immersion liquids and exposure radiation, leading to reduced lifetime and the need for frequent replacement.
Innovation Solution
A removable surface member with a plastic material or polymer layer sandwiched between two metal layers, featuring a stabilizing layer and a transmission reduction layer to protect against deep ultraviolet (DUV) radiation, and an adhesive for secure attachment to the apparatus surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a removable member is used to modify surface properties in an immersion lithographic apparatus, then the surface properties can be adjusted and improved, but the member deteriorates under immersion liquid and radiation exposure, reducing its lifetime
Solution Approach 1:
The removable member is divided into multiple functional layers: a base layer providing structural support, a surface modification layer for desired surface properties, and protective layers (adhesive layer and radiation-resistant layer) to shield against deterioration factors. This segmentation allows each layer to specialize in one function while protecting the others.
Solution Approach 2:
The removable member uses a composite structure combining multiple materials with different properties: the base layer may use a durable material, the surface layer provides specific surface properties, the adhesive layer ensures secure attachment, and the radiation-resistant layer blocks DUV radiation. This composite approach allows the member to simultaneously achieve surface modification functionality and resistance to immersion liquid and radiation damage.
2Ease of manufacture
If the removable member is made from a single material to simplify manufacturing, then ease of manufacture is improved, but the member cannot simultaneously resist both immersion liquid deterioration and DUV radiation damage
Solution Approach 1:
Instead of using a single material, the member is segmented into multiple layers, each made from materials optimized for specific functions. The base layer provides structural integrity, the surface layer provides desired surface properties, the adhesive layer ensures attachment, and the radiation-resistant layer specifically blocks DUV radiation. This segmentation enables protection against multiple harmful factors while maintaining manufacturing feasibility through layer-by-layer fabrication.
Solution Approach 2:
The member employs a composite material structure where each layer is made from a material specifically selected for its properties. The combination of materials in the composite structure provides simultaneous resistance to immersion liquid deterioration and DUV radiation damage, which would be impossible with a single material. The composite approach maintains ease of manufacture through standardized layer deposition techniques.
3Object-affected harmful factors
If the removable member is made opaque to DUV radiation to protect underlying components, then protection against radiation is improved, but the member cannot be removed and replaced easily
Solution Approach 1:
The radiation protection function is segmented into a dedicated radiation-resistant layer that is part of the removable member structure. This layer can be made opaque to DUV radiation to protect underlying components. The segmentation allows the radiation-resistant layer to be integrated into the removable member while maintaining the member's overall removability through the adhesive layer design that enables clean detachment without damaging the radiation-resistant functionality.
Solution Approach 2:
The member uses a composite structure where the radiation-resistant layer provides opaque protection against DUV radiation, while the adhesive layer provides controlled bonding that allows easy removal and replacement. The composite material approach enables both functions - radiation protection and ease of operation - to coexist without compromising either property.
4Duration of action of stationary object
If the removable member uses a complex multi-layer structure to protect against deterioration, then lifetime is extended, but the device complexity increases
Solution Approach 1:
The multi-layer structure segments different protection functions into distinct layers: the base layer for structural support, the surface modification layer for surface properties, the adhesive layer for attachment, and the radiation-resistant layer for radiation protection. This segmentation extends lifetime by providing specialized protection for each function while keeping the overall structure manageable through clear functional separation and standardized layer deposition processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution extends the lifespan of removable members by preventing deterioration from immersion liquids and DUV radiation, reducing the frequency of replacements and maintaining surface properties effectively.
Implementation Method 1
the covering portion is opaque to DUV radiation
Implementation Method 2
an adhesive on the second surface to attach the member to a surface of an immersion lithographic apparatus
Data Source
AI summary
A member is provided to prevent immersion liquid ingress to a gap between components or to adhere to at least one component to provide a surface to a feature of an immersion system. The member has a plastic sealing portion that is adhered to the component(s). The plastic sealing portion is opaque to DUV radiation. It may be resistant to degradation through exposure to DUV radiation. It may have a liquid phobic coating or property.