Removable Sample Holder Entry for In-Situ Observation

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Solution Overview

Problem

Conventional charged particle beam devices face limitations in combining multiple observational capabilities within a sample holder without increasing size, which can lead to vibration issues and hinder high-resolution observations, and lack consideration for sample and holder cleaning, especially during in-situ observations in various environments.

Innovation Solution

A removable reverse side entry portion with integrated functions such as voltage application, gas injection, atmosphere blocking, micro vacuum gauge, temperature-humidity sensing, stress application, and cooling is inserted into the sample holder, allowing for various environmental conditions to be created and observed without damaging the device, and enabling separate cleaning of the sample and holder.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple functions are equipped in the sample holder, then the versatility of the charged particle beam device is improved, but the sample holder increases in size and becomes more susceptible to vibration

Engineering Contradiction:

Improveversatility of sample holderVSAvoidsize of sample holder

Core Design Contradiction:

Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

The sample holder is divided into a main body and a removable reverse side entry portion. The reverse side entry portion can be detached and replaced to provide different functions (gas injection, voltage application, stress application, etc.) without permanently increasing the size of the main sample holder structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The removable reverse side entry portion is inserted into the sample holder body, creating a nested structure where functional components are housed within the existing sample holder volume rather than adding external attachments that would increase overall size.

Inventive Principle:

Principle #7Nested doll (Nesting)

2Adaptability or versatility

If multiple functions are equipped in the sample holder, then the versatility of the charged particle beam device is improved, but the sample holder becomes more susceptible to vibration making high-resolution observations difficult

Engineering Contradiction:

Improveversatility of sample holderVSAvoidobservation resolution

Core Design Contradiction:

Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

By segmenting the sample holder into a stable main body and removable functional portions, the core observation structure remains lightweight and vibration-resistant, while functions are added through detachable components that can be optimized for minimal interference with observation precision.

Inventive Principle:

Principle #1Segmentation

3Adaptability or versatility

If the sample holder is made larger to accommodate multiple functions, then the versatility is improved, but the device complexity increases

Engineering Contradiction:

Improveversatility of sample holderVSAvoidcomplexity of sample holder

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The removable reverse side entry portion is designed as a universal interface that can accommodate different functional attachments (gas injection mechanism, voltage application electrodes, stress application devices, cleaning mechanisms) through a standardized structure, reducing overall device complexity compared to having separate specialized holders for each function.

Inventive Principle:

Principle #6Universality (Multi-functionality)

4Adaptability or versatility

If conventional methods are used for in-situ observation in various environments, then observation capability is improved, but sample and holder cleaning becomes difficult

Engineering Contradiction:

Improvein-situ observation capabilityVSAvoidease of cleaning sample and holder

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The reverse side entry portion is designed to be removable from the sample holder body. After use in various environments (gas atmosphere, liquid atmosphere, heated, cooled), the detachable portion can be easily removed and cleaned separately from the main sample holder, solving the cleaning difficulty while maintaining in-situ observation capabilities.

Inventive Principle:

Principle #2Taking out (Extraction)

Data Source

PatentUS10068745B2Charged particle beam device and sample holder for charged particle beam device

Publication Date: 2018.09.04 HITACHI HIGH TECH CORP

AI summary

The purpose of the present invention is to provide a charged particle beam device and a sample holder for the charged particle beam device by which it is possible to form various environments, and perform in-situ observation and analysis without removing a sample from the charged particle beam device. In the present invention, inserting a detachable reverse side entry portion from a side facing a sample holding means, said portion being provided with a function for changing the state of a sample attached to the sample holding means, makes it possible to observe/analyze changes in the sample by a different process without removing the sample from the charged particle beam device by combining a reverse side entry portion having a different function with the sample holding means. The reverse side entry portion comprises two parts, and a tip thereof, which is one of the parts, is removable. After mounting the reverse side entry portion onto the sample holding means, the sample can be transported while maintaining the same atmosphere, and the sample can be transported between different devices without exposing the sample to air.