Removable Source Electrode for Inductively Coupled Plasma Ion Sources
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Solution Overview
Problem
Current inductively coupled plasma (ICP) ion sources face operational difficulties due to the fixed attachment of the source electrode, which leads to contamination, thermal decomposition, and vacuum seal failures, resulting in increased costs and reduced ion generation efficiency.
Innovation Solution
A system for removably attaching a source electrode to the plasma reaction chamber, ensuring a vacuum-tight, thermally conductive, and precisely positioned interface that can withstand strong electric fields, using materials like molybdenum or nickel-based alloys, and employing various attachment methods such as press-fit, screw-clamp, cam-clamp, and pin-fastening mechanisms to facilitate easy maintenance and reconfiguration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the source electrode is fixedly attached using epoxy glue, then the attachment is simple and the vacuum seal is formed, but the plasma degrades the epoxy causing contamination, thermal decomposition, and vacuum seal failures
Solution Approach 1:
The source electrode is divided into two separate components: a removable electrode portion and a fixed mounting structure. The removable portion can be detached and replaced without replacing the entire source tube, allowing the electrode to be segmented into replaceable and permanent parts. This resolves the contradiction by enabling simple attachment of the electrode while maintaining reliability through replaceability when plasma degradation occurs.
Solution Approach 2:
The invention enables the source electrode to be discarded and recovered - specifically, the removable electrode portion can be removed and replaced when degraded by plasma, while the expensive source tube is retained and reused. This addresses the reliability issue by allowing replacement of degraded components without requiring complete system replacement.
2Reliability
If the source electrode is fixedly attached, then the vacuum seal is maintained, but the source tube cannot be cleaned and must be discarded when contaminated
Solution Approach 1:
By segmenting the source electrode into a removable portion and a fixed mounting structure, the invention enables maintenance without compromising vacuum seal integrity. The removable electrode can be detached for cleaning or replacement while the source tube remains in place with its vacuum seal intact, resolving the contradiction between maintaining seal integrity and enabling easy maintenance.
Solution Approach 2:
The invention allows the source tube to be recovered and reused by enabling separate replacement of the electrode portion. When contamination occurs, only the removable electrode needs to be replaced while the source tube is cleaned and reused, improving ease of repair without sacrificing vacuum seal integrity.
3Strength
If the source electrode is fixedly attached, then the attachment is robust, but the source tube becomes expensive to operate due to replacement costs
Solution Approach 1:
The segmentation of the source electrode into removable and fixed portions allows for selective replacement of only the electrode when degraded, rather than replacing the entire source tube. This maintains robust attachment during operation while significantly reducing operational costs by extending the life of the source tube.
Solution Approach 2:
The invention enables discarding only the consumable electrode portion while recovering and reusing the expensive source tube. This resolves the contradiction by maintaining strong attachment during use while reducing operational costs through component recovery and reuse.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables prolonged operation with reduced contamination, thermal stability, and improved ion generation efficiency by allowing for the replacement and cleaning of the source electrode, maintaining high vacuum pressures, and preventing lens distortions, thus reducing operational costs and enhancing the performance of focused ion beam systems.
Implementation Method 1
the heating of the epoxy by the elevated source electrode temperature from plasma bombardment and eddy current heating
Implementation Method 2
the heating of the epoxy by the elevated source electrode temperature from plasma bombardment and eddy current heating
Implementation Method 3
Inductively coupled plasma (ICP) sources have advantages over other types of plasma sources when used with a focusing column to form a focused beam of charged particles
Data Source
AI summary
An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.