Removable Susceptor Inner Portion for Faster Chamber Changeover
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Solution Overview
Problem
The replacement of susceptors in process chambers, such as semiconductor process chambers, results in significant downtime due to the need for substantial disassembly and requalification of the processing equipment, which is time-consuming and prone to errors.
Innovation Solution
A susceptor assembly with a removable inner portion that can be transferred through the same opening as substrates, allowing for automated replacement using existing equipment, reducing manual handling errors and enabling faster switching between different susceptors for various processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a susceptor is replaced with a new or different susceptor, then process performance can be optimized or processes can be changed, but significant downtime occurs due to substantial disassembly and requalification of the processing equipment
Solution Approach 1:
The susceptor assembly is divided into two separate portions: an outer portion that remains in the process chamber and an inner portion that can be independently removed and replaced. This segmentation allows the inner portion to be quickly exchanged without removing the entire susceptor assembly, thereby reducing downtime while maintaining process flexibility.
Solution Approach 2:
The inner portion of the susceptor is designed to nest within the outer portion. The inner portion fits into a cavity formed by the outer portion, allowing for easy insertion and removal. This nested structure enables rapid replacement of the inner susceptor portion without disturbing the outer portion, thus minimizing downtime while allowing process changes.
2Adaptability or versatility
If manual handling is used for susceptor replacement, then flexibility in handling different susceptor types is maintained, but manual handling errors increase and precision decreases
Solution Approach 1:
The outer portion of the susceptor assembly serves multiple functions: it provides structural support, maintains positioning within the process chamber, and accommodates different inner portion configurations. This universal design allows automated handling systems to work with a standardized interface while supporting various process-specific inner portions, reducing manual handling errors while maintaining flexibility.
3Adaptability or versatility
If the entire susceptor assembly is removed for replacement, then complete susceptor exchange is achieved, but equipment complexity and disassembly requirements increase
Solution Approach 1:
The susceptor assembly is segmented into an outer portion and an inner portion that can be independently handled. This segmentation simplifies the replacement process by allowing only the inner portion to be removed and exchanged, rather than disassembling and removing the entire assembly, thereby reducing equipment complexity while maintaining complete susceptor exchange capability.
Solution Approach 2:
The inner portion of the susceptor is extracted as a separate, independently replaceable component from the outer portion. This extraction allows the inner portion to be replaced without removing or disturbing the outer portion, simplifying the replacement procedure and reducing the complexity of equipment operations while achieving complete susceptor exchange.
Data Source
AI summary
A substrate support assembly is provided including: a susceptor assembly that includes an inner portion having an inner body, an outer rim disposed around the inner body, and a plurality of recessed portions, each recessed portion recessed relative to a lower surface of the inner body; and an outer portion positioned around the inner portion, the outer portion including an inner ledge. The outer rim of the inner portion is positioned on the inner ledge of the outer portion; and a first plurality of lift pins. Each lift pin of the first plurality of lift pins underlies one of the recessed portions of the inner portion of the susceptor assembly.