Removable Transparent Membrane Pellicle for Reticle Protection
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Solution Overview
Problem
In photolithography, the challenge is to prevent airborne particles such as dust, debris, or condensation from contacting the reticle surface during the manufacturing of integrated circuit devices at sub-micron feature sizes, where traditional solutions are inadequate in ensuring cleanliness and efficient replacement of protective membranes.
Innovation Solution
A pellicle system with selectively removable frame members, where the second frame member is annularly coupled to a transparent membrane, allowing for easy separation and replacement, thereby maintaining the reticle's cleanliness and extending its usage by periodic replacement of the membrane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a traditional fixed pellicle structure is used to protect the reticle from airborne particles, then the reticle is protected from contamination, but the transparent membrane cannot be easily replaced or cleaned when contaminated
Solution Approach 1:
The pellicle frame is divided into multiple separable members (first frame member, second frame member, third frame member) that can be selectively assembled and disassembled. This segmentation allows the transparent membrane to be easily replaced by removing and reassembling the frame members, resolving the contradiction between protecting the reticle and enabling easy membrane replacement.
2Duration of action of stationary object
If the transparent membrane is made durable to withstand high-intensity light exposure, then the reticle can be used longer, but the membrane becomes difficult to clean and replace
Solution Approach 1:
The pellicle frame members are designed with dynamic, selectable connectivity - they can be in an engaged state during use to protect the reticle, or disengaged to allow membrane replacement. This dynamic design enables the system to switch between protection mode and maintenance mode, resolving the contradiction between durability and ease of maintenance.
3Object-affected harmful factors
If a complete pellicle assembly is used to cover the reticle, then airborne particles are blocked from the reticle surface, but the entire assembly must be replaced if the membrane becomes contaminated
Solution Approach 1:
The transparent membrane is extracted as a separate, replaceable component from the pellicle frame assembly. The frame members can be disassembled to remove and replace only the contaminated membrane, while the frame itself and the expensive reticle remain in use. This resolves the contradiction by allowing selective replacement of the consumable membrane rather than replacing the entire assembly.
Data Source
AI summary
According to one embodiment, a pellicle includes first and second frame members that are selectively removable from one another. The second frame member has an annular shape similar to and is physically coupled to an outer periphery of a transparent membrane. The second frame member configured to be selectively coupled to the first frame member from a engaged position adjacent to the first frame member to a disengaged position in which the second frame member is separated from the first frame member.