Replaceable End Effector Contact Pads for Substrate Handling

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Solution Overview

Problem

In electronic device manufacturing, conventional end effectors with integrally-machined contact pads wear out and become contaminated, leading to increased substrate sliding and reduced useful life, necessitating periodic replacement, which is costly and inefficient.

Innovation Solution

The use of replaceable contact pads with a contact pad head, shaft, and circular securing member, where the shaft is inserted into an aperture and secured by a circular member, allowing for easy replacement when worn, reducing substrate sliding and extending the end effector's operational life.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If integrally-machined contact pads are used in end effectors, then the end effector structure is simple and robust, but the contact pads wear out and become contaminated, leading to increased substrate sliding and reduced useful life

Engineering Contradiction:
Improvestructural robustnessVSAvoiduseful life of end effector
Core Design Contradiction:
StrengthVSDuration of action of stationary object

Solution Approach 1:

The contact pad is segmented from the end effector body, allowing it to be replaced independently when worn or contaminated. The contact pad includes a contact pad head with contact surface, a shaft received in an aperture extending into the body, and a circular securing member that attaches the shaft to the end effector body, enabling modular replacement without replacing the entire end effector.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The contact pad is designed as a consumable component that can be discarded when worn or contaminated and replaced with a new one. The shaft and securing member allow for easy detachment and recovery of the contact pad head, enabling rapid replacement to extend the overall operational life of the end effector system.

Inventive Principle:
Principle #34Discarding and recovering

2Ease of manufacture

If integrally-machined contact pads are used, then manufacturing is straightforward, but replacement is costly and inefficient when worn

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidreplacement efficiency
Core Design Contradiction:
Ease of manufactureVSEase of repair

Solution Approach 1:

The contact pad is divided into replaceable components (contact pad head, shaft, securing member) that can be manufactured separately and assembled. This segmentation allows the contact pad to be replaced without replacing the entire end effector, improving repair efficiency while maintaining manufacturing simplicity for each individual component.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The contact pad head is designed as a disposable or short-living component that can be easily replaced when worn. By making the contact pad replaceable rather than integral, the system allows for cost-effective replacement of only the worn contact pad rather than the entire expensive end effector.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Reliability

If replaceable contact pads are used, then substrate sliding is minimized and operational life is extended, but the device complexity increases

Engineering Contradiction:
Improvesubstrate support stabilityVSAvoidend effector structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The contact pad is segmented into modular components (contact pad head, shaft, securing member) that work together to provide stable substrate support. The shaft received in the aperture and secured by the circular securing member creates a reliable connection that prevents substrate sliding while allowing for easy replacement, balancing reliability with manageable complexity.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11600580B2Replaceable end effector contact pads, end effectors, and maintenance methods
Publication Date: 2023.03.07 APPLIED MATERIALS INC
  • US11600580B2 patent drawing
  • US11600580B2 patent drawing
  • US11600580B2 patent drawing

AI summary

Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.