Replaceable Interface Plate Mainframe for Flexible Chamber Reconfiguration

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Solution Overview

Problem

Conventional electronic device manufacturing systems have fixed configurations of substrate access ports, making it necessary to purchase a new mainframe for any changes in configuration, limiting flexibility and increasing costs.

Innovation Solution

A reconfigurable mainframe with replaceable interface plates that can be attached to the facets, allowing for customization of substrate access ports and configuration changes without requiring a new mainframe.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a conventional mainframe with fixed substrate access ports is used, then the structural integrity and pressure bearing capability are maintained, but the adaptability and flexibility of the system are limited

Engineering Contradiction:

Improveconfiguration flexibilityVSAvoidmainframe structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The mainframe is divided into a fixed base structure and replaceable interface plates. The interface plates are separate, interchangeable components that can be detached and replaced independently from the mainframe body, allowing configuration changes without replacing the entire system.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The interface plates are designed with universal mounting features that allow them to be attached to multiple different facets of the mainframe. A single interface plate design can accommodate various substrate access port configurations, enabling one mainframe to support multiple process chamber arrangements.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If the entire mainframe is replaced to change configuration, then the new configuration requirements are met, but the cost and time consumption increase significantly

Engineering Contradiction:

Improveconfiguration change capabilityVSAvoidreconfiguration time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system separates the configurable interface elements (interface plates) from the permanent mainframe structure, allowing only the necessary components to be replaced rather than the entire system, thereby reducing reconfiguration time.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple interface plates with different configurations can be pre-manufactured and stored, allowing for quick swapping when reconfiguration is needed. The interface plates are designed with pre-installed substrate access ports and mounting features that enable rapid installation.

Inventive Principle:

Principle #10Preliminary action

3Adaptability or versatility

If the entire mainframe is replaced to change configuration, then the new configuration requirements are met, but the cost increases significantly

Engineering Contradiction:

Improveconfiguration change capabilityVSAvoidsystem cost

Core Design Contradiction:

Adaptability or versatilityVSLoss of substance

Solution Approach 1:

The mainframe system is segmented into high-value permanent components (base, lid, facets) and lower-cost replaceable components (interface plates). This allows the expensive mainframe structure to be retained while only replacing the cheaper interface plates to achieve configuration changes.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Old interface plates can be removed and replaced with new ones as configuration needs change. The removed interface plates can be archived or replaced, while the expensive mainframe structure is retained and reused, recovering significant investment.

Inventive Principle:

Principle #34Discarding and recovering

4Adaptability or versatility

If replaceable interface plates are introduced, then the adaptability and flexibility are improved, but the structural complexity and manufacturing complexity increase

Engineering Contradiction:

ImprovereconfigurabilityVSAvoidinterface plate manufacturing

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The interface plates are designed with standardized mounting features and substrate access port configurations that are optimized for their specific local function. Each interface plate is manufactured with the precise port locations and mounting features needed for its intended application, while sharing common base design elements.

Inventive Principle:

Principle #3Local quality

Data Source

PatentUS20250125170A1Reconfigurable mainframe with replaceable interface plate

Publication Date: 2025.04.17 APPLIED MATERIALS INC

AI summary

A mainframe of a device fabrication system comprises a base and a plurality of facets on the base, wherein a first facet of the plurality of facets comprises a first frame comprising a first column on a first side of the first facet, a second column on a second side of the first facet, and a beam connecting the first column to the second column. The mainframe further comprises a lid over the plurality of facets, wherein the base, the lid and the plurality of facets together define an interior volume. A first replaceable interface plate is sealed to the first frame of the first facet. The first column of the first facet comprises a first channel that fluidly couples a first vacuum region associated with the first replaceable interface plate to a vacuum port.