Replaceable Magnet Cassette for Mask Holding in Deposition
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Solution Overview
Problem
Conventional deposition apparatuses face challenges in providing an optimal magnetic force for mask attachment, which can damage substrates or fail to secure the mask properly, and require vacuum release for magnetic means replacement, resulting in process inefficiencies.
Innovation Solution
A mask holding device with a cassette system for detachable permanent magnets, allowing adjustable magnetic force and replacement without breaking the vacuum, ensuring optimal attachment and preventing substrate damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a fixed magnetic means is used in the deposition apparatus, then the structure is simple, but the magnetic force cannot be adjusted according to different mask sizes, resolutions, types, and materials
Solution Approach 1:
The magnetic means is divided into multiple separate magnets that can be independently arranged and replaced. This segmentation allows the magnetic force to be adjusted by changing the number, position, and orientation of individual magnets, providing adaptability for different mask configurations without requiring a completely complex reconfigurable system.
Solution Approach 2:
The magnetic means is designed to be dynamically replaceable and reconfigurable. Magnets can be removed and replaced during the deposition process without breaking vacuum, allowing the magnetic force to be adapted to different mask sizes, resolutions, types, and materials while maintaining operational flexibility.
2Reliability
If a strong magnetic force is used to attach the mask to the substrate, then the mask attachment is secure, but wiring or barriers formed in the substrate may be damaged by the magnetic field
Solution Approach 1:
Instead of applying a single strong magnetic force across the entire substrate, the system uses multiple magnets with adjustable positions and orientations to create localized magnetic fields. This allows strong attachment where needed while minimizing magnetic field exposure to sensitive areas of the substrate, such as wiring or barriers.
Solution Approach 2:
The magnetic force parameters (strength, distribution, orientation) can be changed by replacing or reconfiguring the magnets. This allows optimization of the magnetic field to achieve secure mask attachment while controlling the magnetic field strength in specific regions to prevent damage to substrate features.
3Adaptability or versatility
If the magnetic means is replaced by releasing and opening the chamber, then the magnetic means can be changed, but there is a great loss in the deposition process
Solution Approach 1:
The magnetic means is extracted from the vacuum chamber environment and designed to be replaceable through a non-intrusive mechanism. The magnets can be removed and replaced without breaking the vacuum seal, allowing magnetic means replacement while maintaining the vacuum state and continuing the deposition process without interruption.
Solution Approach 2:
An intermediary mechanism is provided that allows magnetic means replacement without direct access to the vacuum chamber interior. This intermediary system enables the exchange of magnetic components while maintaining the vacuum barrier, thus preserving deposition process efficiency.
4Object-affected harmful factors
If a weak magnetic force is used to avoid damaging the substrate, then the magnetic field effect is minimized, but the mask cannot be properly attached to the substrate
Solution Approach 1:
The magnetic attachment system is segmented into multiple independent magnets with adjustable positions and orientations. This allows the magnetic force to be distributed and optimized: strong enough to securely attach the mask to the substrate, yet controllable and localized to minimize damage to substrate features through careful positioning and configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and reliable deposition by supplying the appropriate magnetic force for various mask sizes, types, and materials while maintaining the vacuum state, reducing process losses and ensuring stable mask attachment.
Implementation Method 1
a magnetic means inserted in the substrate holder... holds the mask on the substrate by a magnetic force
Data Source
AI summary
A mask holding device has a replaceable magnetic means, and a deposition apparatus for an organic light emitting device includes the mask holding device. The mask holding device is provided with magnets, and the magnets can be replaced as required so as to change the magnetic force of the mask holding device.