Replaceable Optical Isolator Motor Assembly for UHV Positioning

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Solution Overview

Problem

Existing motor assemblies for lifting devices in ultra-high vacuum environments contaminate the vacuum chamber and require costly downtime for replacement, as they cannot be easily integrated with existing inspection systems and are difficult to maintain.

Innovation Solution

A detachable motor assembly system with a stepper motor and gearhead, housed separately from the lifting device, allows for easy replacement and integration into existing systems, preventing contamination by using a coupling mechanism and vacuum seals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a motor assembly is disposed inside the lifting device enclosure in the vacuum chamber, then the lifting device can be compact and integrated, but the motor cannot be easily replaced without disassembling the lifting device and connected optics

Engineering Contradiction:

Improveintegration of motor assemblyVSAvoidmotor replacement

Core Design Contradiction:

Device complexityVSEase of repair

Solution Approach 1:

The motor assembly is segmented from the lifting device enclosure, allowing it to be independently removed through the access panel without disassembling the lifting device or disconnecting the optical component. The motor assembly includes the motor, gearhead, and coupling mechanism as a separate replaceable unit.

Inventive Principle:

Principle #1Segmentation

2Object-affected harmful factors

If a dynamic vacuum feedthrough is used to couple the motor to the lifting device, then the motor can be disposed outside the vacuum chamber, but the system requires expensive and space-consuming vacuum feedthrough devices and bellows

Engineering Contradiction:

Improvecontamination preventionVSAvoidvacuum feedthrough system

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The motor assembly is extracted from the vacuum chamber environment by providing access through an access panel in the enclosure wall. This eliminates the need for dynamic vacuum feedthroughs and bellows, as the motor operates in atmospheric conditions outside the vacuum chamber while still driving the lifting device inside the vacuum chamber.

Inventive Principle:

Principle #2Taking out (Extraction)

3Object-affected harmful factors

If the motor assembly is disposed outside the vacuum chamber, then contamination of the vacuum environment is avoided, but expensive and space-consuming vacuum feedthrough devices are required

Engineering Contradiction:

Improvevacuum environment contaminationVSAvoidvacuum feedthrough space

Core Design Contradiction:

Object-affected harmful factorsVSVolume of stationary object

Solution Approach 1:

The motor assembly is extracted from the vacuum chamber to the external atmospheric environment, eliminating the need for dynamic vacuum feedthroughs and bellows. The motor couples to the lifting device through a coupling mechanism that transmits motion across the enclosure boundary without requiring complex vacuum sealing components.

Inventive Principle:

Principle #2Taking out (Extraction)

4Stability of the object's composition

If three lifting devices are used to suspend the imaging mirror assembly, then vibration isolation is achieved, but the system requires three separate motor assemblies that cannot be independently replaced

Engineering Contradiction:

Improvevibration isolationVSAvoidmotor replacement

Core Design Contradiction:

Stability of the object's compositionVSEase of repair

Solution Approach 1:

Each of the three lifting devices is equipped with a separate, independently replaceable motor assembly. The modular design allows any single motor assembly to be removed and replaced through its own access panel without affecting the other two lifting devices or requiring disconnection of the optical component, enabling independent maintenance of each actuator.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system maintains the ultra-high vacuum environment integrity by minimizing contamination and enabling quick motor replacement without disrupting system operations.

Implementation Method 1

The motor assembly may include a stepper motor and a gearhead. The gearhead may be driven by the stepper motor

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

The optical component may be suspended by three isolators due to its high sensitivity to vibration

Methodology Applied

Scientific EffectVibration isolation: Damping

Data Source

PatentUS20260018454A1Method and apparatus for positioning optical isolator assembly with replaceable motor assembly

Publication Date: 2026.01.15 KLA CORP

AI summary

An apparatus includes a lifting device and a motor assembly. The lifting device is disposed in a lifting device housing and is configured to adjust a vertical position of an optical component connected to the lifting device. The motor assembly is disposed in a motor housing and is configured to drive the lifting device to adjust the vertical position of the optical component. The lifting device housing, the motor housing, and the optical component are disposed in an ultra-high vacuum chamber of an enclosure. In the case of motor failure, the motor housing can be disconnected from the lifting device housing, and the motor assembly can be decoupled from the lifting device, such that the motor assembly can be replaced.