Replaceable Reference Surface Unit for Interference Objective Lens

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Solution Overview

Problem

Existing interference objective lenses face challenges in achieving optimal contrast for interference fringe images due to the low coherence of white light sources and the need for precise optical path matching, which limits the flexibility in selecting a reference surface matching the measurement target's reflectivity, especially for surfaces with diverse reflectivity like metals and glasses.

Innovation Solution

A detachable reference surface unit with adjustable inclined angles and various shapes is integrated into the interference objective lens, allowing for the selection of optimal reference surfaces and precise adjustment to match the measurement target's surface texture, enabling flexible and efficient measurement across different targets.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a fixed reference surface is used in the interference objective lens, then the optical path can be maintained at a fixed position, but the adaptability to measurement targets with diverse reflectivity is reduced

Engineering Contradiction:
Improveoptical path stabilityVSAvoidadaptability to different reflectivity surfaces
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The reference surface is separated from the objective lens into a独立的reference surface unit that can be detached and replaced. This segmentation allows the reference surface to be independently selected and changed without affecting the objective lens, enabling adaptation to different measurement targets while maintaining optical path stability through precise repositioning mechanisms

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The reference surface unit is designed with adjustable positioning capabilities, allowing dynamic adjustment of the reference surface position and inclination angle. This dynamic adjustment enables optimization of the optical path difference and interference fringe contrast for different measurement targets, transforming a static system into an adaptable one

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If multiple interference objective lenses are prepared for different measurement targets, then the measurement precision for each target can be optimized, but the device complexity increases

Engineering Contradiction:
Improveinterference fringe contrastVSAvoidnumber of lenses and devices
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

A single interference objective lens is designed to perform multiple functions by incorporating a replaceable reference surface unit. The lens can be used with different reference surfaces optimized for different measurement targets (metal, glass, transparent materials), making one lens universally applicable to various measurement scenarios without sacrificing measurement precision

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

Instead of using multiple fixed lenses, the system allows discarding the reference surface unit from one configuration and recovering it in another configuration with a different reference surface. This enables flexible reconfiguration of the interference objective lens for different measurement tasks, reducing the need to maintain multiple specialized devices

Inventive Principle:
Principle #34Discarding and recovering

3Ease of manufacture

If the reference surface is integrated into the objective lens, then the optical path alignment is simplified, but the flexibility to adjust reference surface inclination and selection is reduced

Engineering Contradiction:
Improveoptical path alignmentVSAvoidadjustment flexibility
Core Design Contradiction:
Ease of manufactureVSEase of operation

Solution Approach 1:

The reference surface unit incorporates adjustable mechanisms that allow dynamic modification of the reference surface inclination angle and position. This enables operators to optimize the optical path difference and interference fringe contrast for different measurement conditions, providing operational flexibility while maintaining alignment capability through designed adjustment ranges

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for consistent high-contrast interference fringe images and rapid measurement by enabling the use of optimal reference surfaces and automatic or manual adjustment of the reference surface unit, reducing the need for multiple lenses and devices.

Implementation Method 1

the light having passed the reference optical path is reflected on the reference surface, and the light having passed the measurement optical path is reflected on the surface to be measured. The reflected lights are again synthesized at the beam splitter, which is then output as an interference light

Methodology Applied
Scientific EffectLight interference: Interference

Implementation Method 2

The objective lens is configured to converge light emitted from a light source toward a measurement target

Methodology Applied
Scientific EffectLight convergence: Lens

Implementation Method 3

The light converged by the objective lens is split at the beam splitter into a reference optical path facing toward the reference surface becoming a reference and a measurement optical path facing toward a measurement target surface

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS10042151B2Interference objective lens and reference surface unit set
Publication Date: 2018.08.07 MITUTOYO CORP
  • US10042151B2 patent drawing
  • US10042151B2 patent drawing
  • US10042151B2 patent drawing

AI summary

An interference objective lens includes: an objective lens configured to converge a light to be emitted from a light source toward a measurement target; a reference surface unit having a reference surface; and a beam splitter configured to split the light having passed through the objective lens into a reference optical path facing toward the reference surface and a measurement optical path facing toward the measurement target, to synthesize a reflected light from the reference surface and a reflected light from the measurement target, and to output the same as an interference light, wherein the reference surface unit is configured to be replaceable.