Replaceable Substrate Gripper Structure for Chemical-Resistant Handling
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in maintaining the durability and chemical resistance of the rotator components, leading to reduced maintenance efficiency and uneven processing due to the need for replacing entire rotators or compromising on material properties for either strength or chemical resistance.
Innovation Solution
A substrate processing apparatus with a substrate holder that includes a gripper attached to a base, where the gripper comes into contact with the substrate's periphery to grip it, allowing for easy replacement and material selection based on the type of film and processing liquid, enhancing durability and preventing Galvanic corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the entire rotator is replaced to improve durability, then the service life is extended, but the maintenance time and cost increase
Solution Approach 1:
The rotator is divided into separate components: a gripper that contacts the substrate and a holder body. The gripper can be replaced independently without replacing the entire rotator, reducing maintenance time while maintaining durability through component-specific material selection.
2Strength
If a material with high strength is used for the rotator, then the mechanical strength is improved, but the chemical resistance deteriorates
Solution Approach 1:
Different materials are used for different parts of the rotator assembly. The holder body uses a material optimized for mechanical strength, while the gripper uses a material with high chemical resistance suitable for contact with processing liquids and films, allowing each component to have locally optimized properties.
3Reliability
If a material with high chemical resistance is used for the rotator, then the chemical resistance is improved, but the mechanical strength deteriorates
Solution Approach 1:
The rotator is segmented into components that can be made from different materials. The gripper, which requires high chemical resistance, can be made from chemically resistant material, while the holder body, which requires high mechanical strength, can be made from structurally stronger material.
4Manufacturing precision
If the gripper material is changed to prevent Galvanic corrosion, then the processing uniformity is improved, but the device complexity increases
Solution Approach 1:
The gripper is extracted as a separate replaceable component from the holder body. This allows the gripper material to be specifically selected to prevent Galvanic corrosion with metal films, improving processing uniformity, while the overall device structure remains relatively simple through modular design.
Data Source
AI summary
A substrate processing apparatus that supplies a processing liquid to a front surface of a substrate which is rotating, includes: a substrate holder configured to hold the substrate, wherein the substrate holder includes: a gripper configured to come into contact with a periphery of the substrate to grip the substrate; and a base to which the gripper is attached.