ReRAM Oxygen Control Layer Resistance Distribution

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Solution Overview

Problem

Resistive random-access memory (ReRAM) devices exhibit variability in programming/erasing due to filamentary resistive switching, leading to current leakage in three-dimensional configurations, which hinders their application in neural network systems and Internet of Things devices.

Innovation Solution

A method involving a first programming pulse set to acquire a reference accumulated resistance distribution, followed by a second pulse set with adjusted voltages, currents, or pulse widths to achieve a predetermined resistance distribution, or manufacturing processes to adjust the oxygen content in an oxygen control layer to control the accumulated resistance property of ReRAM devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If filamentary resistive switching is used in ReRAM devices, then high device density and fast programming/erasing speed are achieved, but programming/erasing variability increases and current leakage occurs in three-dimensional configurations

Engineering Contradiction:
Improveprogramming/erasing speedVSAvoidprogramming/erasing variability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent applies parameter changes by modifying the oxygen distribution in the oxygen control layer through adjusted manufacturing processes. This changes the resistance characteristics of the ReRAM device, enabling better control over programming/erasing variability while maintaining high speed performance. The oxygen content gradient in the control layer allows for tuned resistance values that reduce variability in filamentary switching.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements local quality by creating a non-uniform oxygen distribution within the oxygen control layer. Different regions of the control layer have different oxygen concentrations, which locally modulates the resistance properties. This spatial variation in oxygen content allows for optimized local switching characteristics, reducing overall device variability while maintaining high density and speed.

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If three-dimensional construction is configured by ReRAM device, then high device density is achieved, but current leakage easily occurs

Engineering Contradiction:
Improvedevice densityVSAvoidcurrent leakage
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

The patent uses parameter changes by adjusting the oxygen distribution in the oxygen control layer to modify the resistance characteristics of the ReRAM device. This enables better control over leakage current in three-dimensional configurations while maintaining high device density. The oxygen content adjustment allows for optimized resistance values that suppress unwanted current paths.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If incremental step pulse programming is applied with adjusted voltages, currents or pulse widths, then predetermined accumulated resistance distribution is achieved, but programming process complexity increases

Engineering Contradiction:
Improveaccumulated resistance distribution precisionVSAvoidprogramming process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies self-service by utilizing the inherent properties of the oxygen control layer with its non-uniform oxygen distribution. The device structure itself provides the mechanism for achieving predetermined resistance distributions through controlled oxygen diffusion and migration during programming. This reduces the need for complex external control mechanisms while achieving precise resistance control through the device's own characteristics.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces programming/erasing variations, enhances multi-level-cell applications, and improves the suitability of ReRAM devices for neural network systems by achieving precise set and reset states and increased recognition precision.

Implementation Method 1

the oxygen distribution in the oxygen control layer is adjusted by several processes for manufacturing a ReRAM device having an oxygen control layer

Methodology Applied
Scientific EffectOxygen diffusion: Diffusion

Implementation Method 2

there is still a lot of variability in programming/erasing of the ReRAM device relying upon the filamentary resistive switching of the TMO

Methodology Applied
Scientific EffectResistive switching: Electrical Resistance

Data Source

PatentUS10892010B2Method for controlling accumulated resistance property of ReRAM device
Publication Date: 2021.01.12 MACRONIX INTERNATIONAL CO LTD
  • US10892010B2 patent drawing
  • US10892010B2 patent drawing
  • US10892010B2 patent drawing

AI summary

A method for controlling accumulated resistance property of a ReRAM device, wherein the method includes steps as follows: A first programing pulse set is firstly applied to a ReRAM device for acquiring a reference accumulated resistance distribution. A second programing pulse set is then provided according to the reference accumulated resistance distribution, and the second programing pulse set is applied to the ReRAM device, to make the ReRAM device having a predetermined accumulated resistance distribution.