Residual Pulse Cost Calculation for Laser Component Replacement
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Solution Overview
Problem
In semiconductor exposure apparatuses, the wide spectral linewidth of excimer laser beams leads to chromatic aberration, reducing resolution, and existing solutions like line narrowing modules are insufficient to ignore chromatic aberration effectively.
Innovation Solution
A residual pulse cost calculation method and processor system that acquires and processes data to calculate the residual pulse count and cost of light source components, considering operation pulse counts, standard guaranteed pulse counts, and pulse unit prices, allowing for predictive maintenance and cost assessment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a line narrowing module is provided in the laser resonator to narrow the spectral linewidth, then chromatic aberration is reduced, but device complexity increases
Solution Approach 1:
An etalon is introduced as an intermediary optical element within the laser resonator to narrow the spectral linewidth of the excimer laser beam. The etalon acts as a selective filter that transmits only specific wavelengths, thereby reducing chromatic aberration in the projection lens while maintaining the overall laser system structure
Solution Approach 2:
The spectral linewidth parameter of the laser beam is actively changed by adjusting the etalon's optical properties (such as its thickness and refractive index). By controlling the etalon's parameters, the laser output is transformed from a broad spectrum to a narrow linewidth, resolving the chromatic aberration issue without requiring complex external filtering systems
2Loss of energy
If component replacement is delayed to reduce costs, then operational costs decrease, but reliability decreases due to potential failure
Solution Approach 1:
The system performs preliminary calculation of residual pulse costs before component failure occurs. By computing the cost of remaining pulses and comparing it with replacement costs in advance, the system enables proactive decision-making about component replacement timing, avoiding both premature replacement and failure-induced downtime
Solution Approach 2:
The system continuously monitors component usage (operation pulse count) and provides feedback through residual pulse cost calculations. This feedback loop allows operators to make informed decisions about maintenance timing by understanding the economic implications of continued operation versus replacement, optimizing the balance between cost and reliability
Data Source
AI summary
A residual pulse cost calculation method for a component of a light source which outputs a pulse laser beam includes, by a processor, acquiring first data in which the component of the light source and an operation pulse count of the component sequentially stored through an operation of the light source are associated with each other, acquiring second data in which the component and a standard guaranteed pulse count of the component are associated with each other, acquiring third data in which the light source and a pulse unit price of the light source are associated with each other, calculating a residual pulse count of the component from the operation pulse count and the standard guaranteed pulse count, calculating a residual pulse cost of the component from the residual pulse count and the pulse unit price, and outputting the residual pulse cost.