Resin Cleaning Basket Assembly for Contamination-Free Silicon Etching

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Solution Overview

Problem

The existing cleaning baskets made of resin for polycrystalline silicon are prone to degradation when exposed to fluonitric acid, leading to cracking, peeling, and the release of resin fragments that contaminate the silicon during the etching process.

Innovation Solution

A cleaning basket with component parts made of fluorine resin, coupled using resin screws, eliminating the need for welding and reducing the risk of contamination by preventing resin fragment release.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If the cleaning basket parts are welded together to form a box shape, then the structural strength is improved, but the resin parts become more easily degraded leading to cracking and peeling

Engineering Contradiction:
Improvestructural strengthVSAvoidresin degradation resistance
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The cleaning basket is divided into multiple separate resin component parts that are not welded together but rather held in position by the polycrystalline silicon rods themselves. This segmentation eliminates welded joints that are prone to degradation while maintaining structural integrity through the functional arrangement of components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The polycrystalline silicon rods serve as an intermediary element that holds the resin component parts in their proper positions without requiring direct connection between the resin parts. This mediator approach allows the resin parts to remain separate and avoid degradation at connection points.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If welding is used to assemble the cleaning basket, then the manufacturing process is simplified, but resin fragments are released contaminating the polycrystalline silicon

Engineering Contradiction:
Improveassembly simplicityVSAvoidresin fragment contamination
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The cleaning basket components are kept as separate resin parts that do not require welding or other joining processes. Each component can be manufactured independently and assembled without generating harmful fragments, thereby eliminating contamination risks while maintaining ease of manufacture.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The resin component parts are designed to be simple, separate elements that can be easily replaced if needed, rather than permanently joined through welding. This approach prioritizes cleanliness and contamination prevention over permanent assembly.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Data Source

PatentUS20240332038A1Cleaning basket
Publication Date: 2024.10.03 TOKUYAMA CORP
  • US20240332038A1 patent drawing
  • US20240332038A1 patent drawing
  • US20240332038A1 patent drawing

AI summary

In order to prevent contamination of polycrystalline silicon in a cleaning step, a cleaning basket (1) is a cleaning basket (1) used for cleaning polycrystalline silicon in a state in which the polycrystalline silicon is accommodated in the cleaning basket and includes a plurality of component parts (10) each made of a resin, the plurality of component parts (10) being coupled to each other by screwing screws (N) each made of a resin.