Resin-Bonded Sheet Heater for Electrostatic Chuck Thermal Uniformity
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Solution Overview
Problem
Existing electrostatic chuck heaters face challenges in achieving high thermal uniformity due to deformation or reaction of heater electrodes during co-firing, leading to changes in resistance values.
Innovation Solution
The electrostatic chuck heater incorporates a resin sheet heater with heater electrodes that are resin-bonded to a ceramic sintered body and a metal support pedestal, avoiding exposure to firing temperatures, allowing for precise resistance setting and individual power control through jumper wires and a ground electrode configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If heater electrodes are embedded in ceramic sintered body through co-firing, then the heater electrodes are integrated with the ceramic structure, but the heater electrodes may be deformed or react with surrounding components causing changes in resistance value
Solution Approach 1:
The heater electrode system is segmented into multiple independent heater electrodes arranged in a matrix pattern. Each heater electrode can be independently controlled through separate power supply terminals, allowing individual resistance adjustment and compensation for any deformation or reaction effects in specific regions.
Solution Approach 2:
The resistance values of heater electrodes are adjusted by changing the wire diameter and length parameters. Thinner and longer wires provide higher resistance, while thicker and shorter wires provide lower resistance. This allows precise control of resistance values to achieve uniform heating across different regions of the ceramic sintered body.
2Temperature
If multiple heater electrodes are used to improve thermal uniformity, then temperature distribution improves, but the complexity of power supply and control increases
Solution Approach 1:
Multiple heater electrodes share common power supply terminals (first and second power supply terminals) that can supply power to all electrodes simultaneously. The electrodes are arranged in a matrix where rows and columns can be independently controlled, providing both individual and group heating capabilities through a unified terminal structure.
Solution Approach 2:
Adjacent heater electrodes are electrically connected in parallel between common power supply terminals. This merging of electrodes allows them to function as a unified heating element when controlled together, reducing the complexity of power supply connections while maintaining the ability to control specific regions independently when needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures high thermal uniformity by preventing electrode deformation and reaction, enabling precise temperature control and improved heat distribution for wafers.
Implementation Method 1
one surface of the sheet heater is resin-bonded to the electrostatic chuck, and the other surface of the sheet heater is resin-bonded to the support pedestal
Implementation Method 2
the one or plurality of heater electrodes are not deformed by heat and do not react with the surrounding components to cause changes in resistance value
Implementation Method 3
an electrostatic chuck being a ceramic sintered body in which an electrostatic electrode is embedded
Data Source
AI summary
An electrostatic chuck heater 20 includes an electrostatic chuck 22, a sheet heater 30, and a support pedestal 60. The electrostatic chuck 22 is obtained by embedding an electrostatic electrode 24 in a ceramic sintered body 26. The sheet heater 30 is a resin sheet 32 having a plurality of correction heater electrodes 34 and a plurality of base heater electrodes 44. A first surface of the sheet heater 30 is resin-bonded to the electrostatic chuck 22, and a second surface of the sheet heater 30 is resin-bonded to the support pedestal 60 made of metal.