Resin Composition for Low-Temperature Insulating Films
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Solution Overview
Problem
Existing resin compositions for insulating films in semiconductor manufacturing require high temperatures for imidization, making it difficult to achieve excellent electrical insulating properties at low temperatures, and they often use organic solvents that are environmentally unfriendly.
Innovation Solution
A resin composition comprising a polymer with specific structural units that allows for rapid dissolution in aqueous alkaline solutions and can form insulating films with high electrical insulating properties at temperatures up to 250°C, using a method that involves reacting specific monomers and polymers in organic solvents to create a film that can be patterned and developed with aqueous solutions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If photosensitive resin composition obtained using photosensitive polyimide precursor or photosensitive polybenzoxazole precursor is used, then good electrical insulating properties are achieved, but high temperature baking (350-400°C) is required for complete imidization
Solution Approach 1:
The invention changes the chemical structure parameters of the polymer by introducing specific structural units (formulae 1a and 1b) with divalent organic groups containing arylene groups. This structural modification enables the polymer to achieve complete imidization at lower temperatures (250°C or lower) while maintaining good electrical insulating properties, thus resolving the contradiction between insulating performance and baking temperature requirement
Solution Approach 2:
The invention creates a composite resin composition by combining the novel polymer with specific additives including photoacid generators, crosslinking agents, and solvents. This composite formulation enables low-temperature processing while achieving the electrical insulating properties previously only attainable at high temperatures, resolving the contradiction between temperature and insulating performance
2Ease of operation
If aromatic polyether with acidic group is used to achieve solubility in aqueous alkaline solution, then development with aqueous solution becomes possible, but electrical insulating properties deteriorate due to remaining acidic groups
Solution Approach 1:
The invention changes the solubility mechanism by modifying the polymer structure to contain specific structural units that provide aqueous alkaline solubility through different chemical mechanisms than traditional acidic groups. The polymer achieves solubility while maintaining electrical insulating properties, resolving the contradiction between ease of aqueous development and insulating performance
Solution Approach 2:
The invention replaces persistent acidic groups with temporary solubilizing structures that can be removed or transformed during processing. The polymer uses structural units that provide solubility during development but do not remain as harmful acidic residues in the final film, thus maintaining electrical insulating properties while enabling aqueous processing
3Productivity
If photosensitive resin composition is used to shorten the process, then pattern formation becomes easier, but large amount of organic solvent is required for development
Solution Approach 1:
The invention changes the development parameter from organic solvent-based to aqueous alkaline solution-based by modifying the polymer structure. This allows the photosensitive resin to be developed with environmentally friendly aqueous solutions while maintaining pattern formation capability, resolving the contradiction between process efficiency and solvent usage
Solution Approach 2:
The invention converts the traditionally harmful organic solvent requirement into a benefit by designing a polymer that can be developed with aqueous alkaline solutions. This eliminates environmental harm while maintaining the productivity benefits of photosensitive processing, thus resolving the contradiction between process efficiency and solvent pollution
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resin composition enables the formation of films with excellent electrical insulating properties at low temperatures and high solubility in aqueous alkaline solutions, reducing environmental impact by minimizing the use of organic solvents.
Implementation Method 1
a polymer having a structural unit of the following formula (1a) and a structural unit of the following formula (1b)... soluble in an aqueous alkaline solution
Implementation Method 2
the imidization by cyclodehydration proceeds completely... baked for a long time at a high temperature, for example, about 350 to 400° C.
Implementation Method 3
a resin composition comprising a polymer... and an organic solvent
Data Source
AI summary
A resin composition for forming an insulating film including a polymer having a structural unit of the following formula (1a) and a structural unit of the following formula (1b); and an organic solvent; wherein T0 is a divalent organic group containing at least one arylene group in which at least one hydrogen atom is substituted with an amino group; and T1 is a divalent organic group containing at least one arylene group having at least one substituent, wherein the substituent is a substituent of the following formula (2); and wherein Z is a divalent, aliphatic, aromatic, or alicyclic group optionally having a substituent.