Resin-Filled Mirror Support Post for Electro-Optical Devices
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing electro-optical devices with mirror support posts face challenges in efficiently filling concave portions without forming large dents on the mirror surface, leading to reduced reflectance and increased processing time due to the need for thick inorganic material accumulation and slow grinding speeds.
Innovation Solution
The electro-optical device incorporates a resin to fill the concave portion of the mirror support post, which prevents large dents on the mirror surface, enhances light utilization efficiency, and allows for the omission of planarization steps, while also increasing grinding speed by thinning the resin on sacrificial layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If an inorganic material is accumulated to fill a concave portion of a mirror support post, then the concave portion is filled, but the inorganic material requires thick accumulation and slow grinding speed, resulting in long processing time
Solution Approach 1:
The patent changes the material parameter from inorganic material to organic resin material. This material substitution fundamentally alters the grinding characteristics, enabling much faster removal rates and significantly reducing the time required to fill and planarize the mirror support post surface.
Solution Approach 2:
The patent employs a sacrificial layer made of organic resin that is intentionally designed to be temporary and easily removable. This sacrificial layer fills the concave portion during manufacturing but can be quickly ground away, allowing for rapid processing compared to permanent inorganic fill materials.
2Shape
If the mirror support post faces a concave portion, then the structure is formed, but a large dent is formed on the mirror surface, decreasing reflectance
Solution Approach 1:
The patent introduces a resin material as an intermediary substance that fills the concave portion of the mirror support post. This resin acts as a mediator between the support post structure and the mirror surface, providing a fillable volume that prevents dent formation while maintaining surface flatness for high reflectance.
Solution Approach 2:
The patent creates a composite structure by combining the mirror support post with a resin fill material. This composite approach allows the concave portion to be filled with a material that can be precisely controlled and planarized, ensuring the mirror surface remains flat and maintains high optical performance.
3Manufacturing precision
If inorganic material is used to fill the concave portion, then filling is achieved, but grinding speed decreases requiring long processing time
Solution Approach 1:
The patent fundamentally changes the material parameter from inorganic to organic resin, which transforms the grinding characteristics. Organic resin materials exhibit much higher removal rates during grinding operations, directly increasing productivity while maintaining complete filling of the concave portion.
Solution Approach 2:
The patent uses a sacrificial resin layer that is designed for easy and rapid removal. This disposable-like approach allows the filling material to be quickly ground away after serving its structural purpose, dramatically improving grinding speed and overall manufacturing productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents dents on the mirror surface, maintains high light utilization efficiency, and ensures proper potential application to the mirror, with a height difference of ≤0.2 μm between the torsion hinge and the resin or flat plate surfaces, thereby minimizing scattering-induced contrast decrease.
Implementation Method 1
a resin which fills an inner side of the concave portion
Implementation Method 2
a reflective layer for a mirror which is laminated on a surface of the resin at a side opposite to the substrate and a surface of the flat plate at a side opposite to the substrate, and configures a mirror together with the second conductive layer for a mirror
Implementation Method 3
it is possible to drive the mirror using an electrostatic force which is generated between the mirror and the address electrode
Data Source
AI summary
An electro-optical device is configured by a laminated body of a second conductive layer and a reflective layer for a mirror. The second conductive layer includes a mirror support post facing a concave portion at a side opposite to a substrate, and a flat plate which extends from an end portion of the mirror support post and faces the substrate. The concave portion is filled with the resin. Surfaces of the flat plate and the resin configure a continuous plane. The reflective layer for a mirror is laminated on a surface of the resin at a side opposite to the substrate, and a surface of the flat plate of the second conductive layer at a side opposite to the substrate.