3D Printed Resin Sheet Compression for Polishing Pad Strength
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Solution Overview
Problem
Resin sheets produced by 3D printing often exhibit inferior mechanical properties, leading to low strength and abrasion resistance, which shortens the lifespan of polishing pads used in applications like semiconductor wafer planarization.
Innovation Solution
A method involving the application of pressure and heat to a sheet-shaped resin modeled article formed by a 3D printer, with specific conditions of temperature, pressure, and time to deform and compress the resin, while using a spacer and performing the process under reduced pressure, to enhance mechanical properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If resin sheet is formed by 3D printing, then material loss is reduced and cost is lowered, but mechanical properties such as strength and abrasion resistance become inferior
Solution Approach 1:
The invention applies heat and pressure parameters to the 3D printed resin sheet, transforming its physical state and improving mechanical properties. By controlling temperature and pressure parameters during the heat press step, the resin layers are fused together, increasing strength and abrasion resistance while maintaining the material efficiency benefits of 3D printing.
2Adaptability or versatility
If resin sheet is formed by 3D printing, then production flexibility is improved, but abrasion resistance decreases leading to shortened polishing pad lifespan
Solution Approach 1:
The invention uses heat and pressure parameters to densify the 3D printed resin structure, improving abrasion resistance and extending polishing pad lifespan. The controlled thermal and mechanical treatment enhances the material's durability while preserving the production flexibility and customization capabilities of 3D printing technology.
3Strength
If pressure and heat are applied to deform the resin sheet, then mechanical properties are improved, but process complexity increases
Solution Approach 1:
The invention combines heat application and pressure application into a single integrated heat press step. By merging these two treatment modalities into one process operation, the device complexity is minimized while still achieving the desired improvement in mechanical properties through the combined thermal and mechanical effects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method significantly improves the mechanical properties of the resin sheets, including storage modulus, breaking stress, and elongation at break, resulting in improved abrasion resistance and extended lifespan of polishing pads.
Implementation Method 1
a step of applying pressure (p) to a sheet-shaped resin modeled article formed by a 3D printer while heating
Implementation Method 2
a step of applying pressure (p) to a sheet-shaped resin modeled article formed by a 3D printer while heating, and deforming the sheet-shaped resin modeled article to obtain a compressed sheet
Data Source
AI summary
The present invention relates to a method for producing a resin sheet containing at least the following step P, Step P: a step of applying pressure (p) to a sheet-shaped resin modeled article formed by a 3D printer while heating, and deforming the sheet-shaped resin modeled article to obtain a compressed sheet; and relates to a polishing pad containing a polishing layer obtained by using the method for producing.