Radiation-Sensitive Resin Stirring for Defect-Free Patterns
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Solution Overview
Problem
Radiation-sensitive resin compositions used in semiconductor manufacturing often develop defects, such as dents or chips, during long-term storage, leading to pattern formation issues.
Innovation Solution
A method for producing a radiation-sensitive resin composition using a stirring device with a specific configuration, including a stirring tank and a stirrer with a rotatable shaft, support parts, and stirring elements arranged to optimize acid generator distribution, which improves stirring efficiency and reduces pattern defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If a radiation-sensitive resin composition is stored for a long period, then the composition can be used after production, but defects such as dents or chips appear in the formed patterns
Solution Approach 1:
The patent applies preliminary action by optimizing the stirring process before storage to prevent future defects. Specifically, the stirrer design with multiple stirring elements and the controlled stirring speed (50-500 rpm for 1-24 hours) ensure complete mixing and homogeneous distribution of acid generators in the resin composition before it is stored. This preliminary thorough mixing prevents aggregation and settling during long-term storage, thereby maintaining pattern quality after extended storage periods.
Solution Approach 2:
The patent applies parameter changes by modifying the stirring conditions including stirring speed (50-500 rpm), stirring time (1-24 hours), and stirrer configuration (multiple stirring elements at different positions). These parameter optimizations ensure homogeneous mixing of the resin composition, preventing defect formation during long-term storage while maintaining pattern quality in lithographic applications.
2Ease of manufacture
If a conventional stirrer is used to mix the resin composition, then the mixing process is simple, but the acid generator distribution remains non-uniform leading to pattern defects
Solution Approach 1:
The patent applies segmentation by dividing the stirrer into multiple independent stirring elements positioned at different locations within the stirring tank. This segmented configuration ensures comprehensive coverage and uniform mixing of the resin composition, preventing acid generator aggregation while maintaining a relatively simple overall manufacturing process.
Solution Approach 2:
The patent applies dynamics by implementing a controllable stirring speed range (50-500 rpm) and extended stirring time (1-24 hours). This dynamic approach allows optimization of mixing effectiveness to achieve homogeneous acid generator distribution throughout the resin composition, improving pattern quality without significantly complicating the manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively suppresses the generation of defects in patterns formed after long-term storage by ensuring uniform component distribution and improved solubility of acid generators, resulting in higher quality pattern formation.
Implementation Method 1
a stirring step of stirring the mixture accommodated in the stirring tank, using the stirrer
Data Source
AI summary
A method for producing a composition, the method being for producing a composition using a stirring device provided with a stirring tank and a stirrer, includes a mixing step of charging a resin, an acid generator, and a solvent into the stirring tank, and a stirring step of stirring the mixture accommodated in the stirring tank, using the stirrer, in which a ratio c of a content of the acid generator to a total mass of the mixture is 0.3% to 2.5% by mass, the stirrer is provided with a rotatable stirring shaft, a plurality of support parts attached to the stirring shaft, and a plurality of stirring elements attached to each of end parts of the plurality of support parts, the shape and the arrangement of the stirring elements are specified, and the positions of the plurality of stirring elements are specified so as to satisfy a specific Expression (1).