Resist Composition Salt for Line Edge Roughness Control
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Solution Overview
Problem
Existing resist compositions fail to produce resist patterns with satisfactory line edge roughness (LER).
Innovation Solution
A resist composition comprising a salt represented by formula (I), a quencher, a resin with an acid-labile group, and an acid generator, which includes specific structural units and acid generators to improve pattern formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional salts are used in resist composition, then the resist pattern can be formed, but the line edge roughness (LER) is not satisfactory
Solution Approach 1:
The patent changes the chemical parameters of the salt component by specifying a particular structural formula (I) with defined substituents (R1-R4, m1-m4). This parameter change in the salt's molecular structure leads to improved line edge roughness while maintaining reliable pattern formation, directly resolving the technical contradiction between precision and reliability.
Solution Approach 2:
The patent creates a composite resist composition system combining a specific salt (formula I), quencher, resin with acid-labile groups, and acid generator. This composite material approach allows the salt to work synergistically with other components, achieving both satisfactory pattern formation reliability and improved line edge roughness that cannot be achieved with conventional single-component modifications.
2Manufacturing precision
If the resist composition is optimized for better line edge roughness, then manufacturing precision improves, but the complexity of the composition increases
Solution Approach 1:
The patent applies local quality by specifying particular structural features in the salt molecule (formula I) at critical positions (R1-R4 substituents and m1-m4 parameters). This localized structural optimization achieves improved line edge roughness without requiring complete redesign of the entire resist composition, thereby limiting the increase in overall complexity.
Solution Approach 2:
By changing specific parameters of the salt structure (formula I) rather than the entire composition, the patent achieves improved manufacturing precision with minimal increase in complexity. The defined parameter ranges in formula (I) provide a systematic way to optimize performance without exploring the entire composition space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition effectively produces resist patterns with improved line edge roughness (LER) through the use of a salt represented by formula (I) and a quencher in combination with a resin and acid generator.
Implementation Method 1
an acid generator
Data Source
AI summary
A salt represented by formula (I), a quencher, and a resist composition including the same:wherein R1, R2, R3 and R4 each represent a halogen atom, an alkyl fluoride group having 1 to 6 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, —CH2— included in the hydrocarbon group may be replaced by —O— or —CO—; and m1, m2, m3 and m4 represent an integer of 0 to 4. When m1 is 2 or more, a plurality of R1 may be the same or different from each other. When m2 is 2 or more, a plurality of R2 may be the same or different from each other. When m3 is 2 or more, a plurality of R3 may be the same or different from each other. When m4 is 2 or more, a plurality of R4 may be the same or different from each other.