Resistance-Based Chamber Temperature Calibration for Multi-Point Accuracy
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Solution Overview
Problem
Current temperature calibration methods for semiconductor process chambers have relatively low accuracy, typically ±0.05° C, which is insufficient for precise temperature control.
Innovation Solution
A method and system for temperature measurement and calibration that involves placing a temperature calibrator with a test structure on a stage, acquiring a functional relationship between resistance and temperature, and using this relationship to accurately determine actual temperatures across multiple calibrators, allowing for precise temperature control through adjustments by a temperature control device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional temperature calibration methods are used with multiple temperature calibrators distributed at five points or nine points on the stage, then temperature calibration can be performed across the chamber, but the measurement precision is limited to ±0.05°C which is insufficient for precise temperature control
Solution Approach 1:
The patent extracts the temperature sensing function from multiple separate temperature calibrators and concentrates it into a single temperature calibrator with multiple test structures. Each test structure contains temperature-sensitive elements that can independently measure temperature at different locations, eliminating the need for multiple physical calibrators while maintaining comprehensive temperature measurement capability across the chamber.
Solution Approach 2:
The single temperature calibrator is designed with multi-functionality by incorporating multiple test structures, each capable of measuring temperature at different positions. This universal design allows one calibrator to perform the function of multiple calibrators, achieving both high measurement precision and reduced quantity of calibration devices.
2Measurement precision
If more temperature calibrators are used to improve measurement precision across the chamber, then temperature distribution can be better characterized, but the device complexity and cost increase
Solution Approach 1:
The patent merges multiple temperature calibration devices into a single integrated temperature calibrator. The multiple test structures are combined within one calibrator body, allowing simultaneous temperature measurements at multiple locations without requiring multiple separate devices. This reduces device complexity while maintaining the ability to characterize temperature distribution across the chamber.
Solution Approach 2:
The temperature calibrator employs a nested structure where multiple test structures are contained within a single calibrator housing. Each test structure is nested within the overall calibrator system, allowing compact integration of multiple measurement functions into one device, thereby reducing the number of separate calibration devices needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves temperature calibration accuracy by using a high-accuracy current resolution to measure resistance and calculate actual temperatures, enabling more precise temperature control and distribution across the chamber.
Implementation Method 1
a first functional relationship between resistance of the first test structure and a temperature is acquired
Data Source
AI summary
A temperature measurement method includes: a temperature calibrator with a first test structure of which a resistance forms a first functional relationship with a temperature is placed on a stage in a chamber; a temperature of the chamber is made to reach a set temperature; a voltage is applied to two opposite ends of the first test structure to obtain a corresponding current and a corresponding resistance; and an actual temperature of the temperature calibrator is acquired according to the resistance and the first functional relationship.