Resistance Measuring Module for Substrate Holder Abnormality Detection

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Solution Overview

Problem

Existing plating technologies cannot accurately determine whether abnormal electric resistance in a substrate holder or substrate is due to the substrate or the holder, leading to inefficiencies in identifying and addressing the root cause of plating issues.

Innovation Solution

A resistance measuring module and method that allows for the measurement of electric resistance in a substrate holder and substrate, using a testing substrate with insulating regions and movable probes to differentiate between holder and substrate issues, enabling detection of abnormalities in the substrate holder or substrate without a testing substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If electric resistance measurement is performed using existing methods, then abnormality detection is possible, but the cause (substrate or substrate holder) cannot be determined

Engineering Contradiction:

Improveabnormality detection accuracyVSAvoidcause identification information

Core Design Contradiction:

Measurement precisionVSLoss of information

Solution Approach 1:

The measurement process is segmented into two distinct phases: substrate holder measurement (without substrate) and substrate measurement (with substrate). This segmentation allows independent evaluation of each component's contribution to abnormal electric resistance, enabling precise cause identification while maintaining detection accuracy.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A test probe serves as an intermediary measurement tool that can selectively contact either the substrate holder or the substrate depending on the measurement phase. This intermediary enables flexible measurement configurations without requiring direct integration between measurement devices and the components being tested.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Loss of information

If comprehensive measurement system is implemented, then cause identification is enabled, but device complexity increases

Engineering Contradiction:

Improvecause identification capabilityVSAvoidmeasurement system structure

Core Design Contradiction:

Loss of informationVSDevice complexity

Solution Approach 1:

The test probe is designed as a universal measurement tool that can perform multiple functions: measuring the substrate holder alone, measuring the substrate on the holder, and switching between measurement modes. This multi-functionality enables comprehensive cause identification without requiring separate dedicated measurement devices for each component, thereby reducing overall system complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The measurement system is designed to be self-sufficient by integrating both substrate holder and substrate measurement capabilities into a single unified system. The system automatically performs sequential measurements and provides comprehensive diagnostic information without requiring external auxiliary measurement devices, reducing complexity while maintaining full diagnostic capability.

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise identification of abnormalities in the substrate holder or substrate, allowing for targeted maintenance and ensuring uniform plating by distinguishing between holder and substrate-related issues, thereby improving plating treatment efficiency.

Implementation Method 1

a resistance measuring module for measuring electric resistance of a substrate holder. The substrate holder has an electric contact configured to feed a current to a held substrate

Methodology Applied

Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 2

A current flows to the substrate W through the external contact 101 and the internal contact 100, and a metal film is formed on the surface of the substrate W

Methodology Applied

Scientific EffectElectrical Conduction: Conduction (electrical)

Data Source

PatentUS10676838B2Plating device, plating method, substrate holder, resistance measuring module, and substrate holder testing method

Publication Date: 2020.06.09 EBARA CORP

AI summary

A resistance measuring module for measuring electric resistance of a substrate holder is provided. The substrate holder has an electric contact configured to feed a current to a held substrate and contactable with the substrate. The substrate holder is able to hold a testing substrate for measurement of electric resistance of the substrate holder, and is configured such that the electric contact comes into contact with the testing substrate in a state where the testing substrate is held. The resistance measuring module includes: a test probe contactable with the testing substrate held in the substrate holder; and a resistance measuring instrument for measurement of a resistance value between the electric contact and the probe via the testing substrate.