Resistor-Group Switching for Multi-Range Device Inspection

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Solution Overview

Problem

Existing device inspection methods are inefficient and time-consuming, particularly when inspecting devices with varying current states.

Innovation Solution

A device inspection apparatus and method that utilizes a series of resistors and a controller to detect potential differences across resistor groups in ascending order of combined resistance, switching between different resistor configurations to accommodate varying current ranges.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If power supply circuits are switched according to preset current ranges, then inspection coverage is improved, but inspection time increases

Engineering Contradiction:
Improveinspection coverageVSAvoidinspection time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The circuit is divided into multiple parallel power supply circuits (first, second, third power supply circuits) each with different resistance values (R1, R2, R3). This segmentation allows the system to handle different current ranges simultaneously through parallel operation, improving both coverage and speed.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The switching device performs rapid sequential switching between different power supply circuits in a periodic manner. By switching at high speed between the first, second, and third power supply circuits based on detected current ranges, the system achieves comprehensive inspection coverage without significant time loss.

Inventive Principle:
Principle #19Periodic action

2Adaptability or versatility

If multiple power supply circuits are used to cover different current ranges, then measurement capability is improved, but device complexity increases

Engineering Contradiction:
Improvecurrent range coverageVSAvoidcircuit complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Multiple power supply circuits with different resistance values are merged into a single integrated inspection apparatus. The switching device and detection unit coordinate these circuits to function as a unified system, achieving multi-range measurement capability without proportionally increasing overall device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The detection unit is designed with universal functionality to detect current across all three power supply circuits. This single detection unit can measure current in any of the first, second, or third power supply circuits, reducing the need for multiple specialized components and simplifying the overall device architecture.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid inspection of device characteristics regardless of the device's state by efficiently measuring across multiple current ranges.

Implementation Method 1

a voltage source 11 that applies a voltage to a device 19 to be inspected

Methodology Applied
Scientific EffectElectrical current flow: Conduction (electrical)

Implementation Method 2

a detector 13 that detects a potential difference across both ends of a resistor group 12a including one or more resistors 12a1 and 12a2 among the plurality of resistors 12a1 through 12an

Methodology Applied
Scientific EffectOhm's Law: Ohm's Law

Data Source

PatentUS12461131B2Device inspection apparatus and device inspection method
Publication Date: 2025.11.04 TOKYO ELECTRON LTD
  • US12461131B2 patent drawing
  • US12461131B2 patent drawing
  • US12461131B2 patent drawing

AI summary

A device inspection apparatus includes a voltage source that applies a voltage to a device to be inspected, a plurality of resistors connected in series between the voltage source and the device, a detector that detects a potential difference across both ends of a resistor group that includes one or more resistors among the plurality of resistors, a switching device that switches the resistor group from which the detector detects the potential difference among the plurality of resistors, and a controller. The controller controls the detector and the switching device, so as to detect a potential difference across both ends of at least two or more different resistor groups, and controls the detector and the switching device to detect the potential difference in an ascending order of a combined resistance value between both ends of the at least two or more resistor groups.