Resistor Thermal Sensor Calibration Using Resistance-TCF Correlation
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Solution Overview
Problem
Conventional resistor thermal sensors suffer from inaccuracies in temperature readings due to process-induced global temperature coefficient variations, leading to inconsistent lot-to-lot resistance values and increased calibration costs.
Innovation Solution
A 1-point temperature coefficient calibration method is employed, determining a resistor temperature coefficient function (RTCF) at a specific temperature, such as 25 degrees centigrade, to calculate a calibrated temperature coefficient based on resistance measurements, reducing the impact of process variations and improving accuracy without increasing calibration costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional resistor thermal sensors are used without calibration, then manufacturing costs are reduced, but temperature reading accuracy deteriorates due to process-induced global temperature coefficient variations
Solution Approach 1:
The patent applies parameter changes by establishing a correlation between resistance value and temperature coefficient, then using this correlation to determine a calibrated temperature coefficient for each sensor based on its measured resistance value. This allows individual calibration without complex multi-point calibration procedures, improving temperature reading accuracy while keeping manufacturing simple and cost-effective.
2Measurement precision
If multi-point temperature coefficient calibration is performed, then temperature reading accuracy is improved, but calibration time and complexity increase
Solution Approach 1:
The patent performs preliminary action by establishing the resistance value to temperature coefficient correlation function during the manufacturing process. This pre-established correlation enables single-point calibration at a reference temperature, eliminating the need for time-consuming multi-point calibration while maintaining high accuracy. The correlation data is stored and used for rapid calibration of each sensor.
Solution Approach 2:
The patent changes the calibration approach from multi-point physical measurements to a single-point measurement combined with parameter transformation using the pre-established correlation function. This transforms the calibration process from time-intensive to rapid, while maintaining accuracy through mathematical correction based on the resistance value.
3Productivity
If single-point calibration is used, then calibration time is reduced, but accuracy may be compromised compared to multi-point calibration
Solution Approach 1:
The patent implements feedback by measuring the actual resistance value of each sensor and using this measurement to select or calculate the appropriate temperature coefficient from the correlation data. This feedback mechanism ensures that each sensor is calibrated based on its specific characteristics, maintaining high accuracy with single-point calibration. The measured resistance value feeds back into the calibration process to determine the correct temperature coefficient.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces errors in temperature readings and enhances stability against process changes, particularly for BEOL_R thermal sensors, by using a calibrated temperature coefficient that considers only resistors with similar measured resistance values, thereby improving accuracy and reducing calibration costs.
Implementation Method 1
the resistance value of a resistor changes as the temperature of the resistor changes. This resistance versus temperature relationship is repeatable over time and captured as a temperature coefficient of the resistor
Data Source
AI summary
A method of calibrating a temperature coefficient of a thermal sensor. The method includes determining a resistance temperature coefficient function (RTCF) based on resistance measurements of resistors on a plurality of semiconductor die at a first temperature and temperature coefficients for the plurality of semiconductor die, measuring, by a measurement circuit, a resistance of a resistor on a semiconductor die at the first temperature, and determining, by a control circuit, a calibrated temperature coefficient of the semiconductor die based on the measured resistance of the resistor on the semiconductor die at the first temperature and the RTCF.