Resonant Accelerometer Cross-Coupling Suppression

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Solution Overview

Problem

Conventional accelerometers face challenges in accurately measuring acceleration due to cross-coupling spectral features at the difference frequency, which are obscured by noise, and require improved filtering to reduce interference and enhance measurement accuracy.

Innovation Solution

The design incorporates two substantially identical vibrating sensors with distinct resonant mode frequencies, driven by an excitation-and-detection circuit to produce a difference frequency that varies monotonically with acceleration, using a low-pass filter with a cut-off frequency less than the difference frequency to reduce noise and isolate the acceleration signal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional filtering is used to remove cross-coupling spectral features, then measurement accuracy is improved, but the filter cut-off frequency must be set below the difference frequency which limits the measurement bandwidth

Engineering Contradiction:
Improveacceleration measurement accuracyVSAvoidmeasurement bandwidth
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The patent changes the operating parameters by driving the vibrating sensors at different resonant frequencies (f1 and f2) such that their difference frequency Δf is sufficiently large. This allows the low-pass filter cut-off frequency fLP to be set above 100 Hz while still being below Δf, thereby resolving the contradiction between measurement accuracy and bandwidth by optimizing the frequency separation parameter.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the difference frequency between resonant modes is increased to improve signal separation, then filtering effectiveness is improved, but the choice of resonant modes becomes more restricted

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidresonant mode selection flexibility
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent systematically varies the operating parameters by selecting different resonant modes (fundamental, third-order, fifth-order) and adjusting their frequency separation to achieve optimal difference frequencies. This approach maintains adaptability while improving signal-to-noise ratio, as the system can choose from multiple mode combinations depending on the specific application requirements.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the accuracy of acceleration measurement by filtering out cross-coupling spectral features, improving the signal-to-noise ratio and reducing the influence of environmental perturbations, while maintaining a suitable balance between noise reduction and measurement speed.

Implementation Method 1

Each vibrating sensor exhibits a corresponding fundamental and higher-order vibrational modes, each characterized by a corresponding fundamental or higher-order resonant mode frequency. The excitation-and-detection circuit drives the first vibrating sensor at a selected resonant mode frequency f1, drives the second vibrating sensor at a selected resonant mode frequency f2

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

The output signal is filtered by at least one low-pass filter characterized by a low-pass cut-off frequency fLP that is less than Δf. This approach enhances the accuracy of acceleration measurement by filtering out cross-coupling spectral features

Methodology Applied
Scientific EffectFiltering: Filter (electronic)

Implementation Method 3

The proof mass is connected to the vibrating sensors so that acceleration in one direction along a sensing axis causes the proof mass to apply a tensile load to the first vibrating sensor and a compressive load to the second vibrating sensor

Methodology Applied
Scientific EffectInertia: Inertia

Data Source

PatentUS11959935B2Resonantly vibrating accelerometer with cross-coupling signal suppression
Publication Date: 2024.04.16 EMCORE CORP
  • US11959935B2 patent drawing
  • US11959935B2 patent drawing
  • US11959935B2 patent drawing

AI summary

An inventive accelerometer includes a proof mass, vibrating sensors, and an excitation-and-detection circuit. The vibrating sensors are substantially identical, and each exhibits corresponding fundamental and higher-order vibrational modes characterized by corresponding fundamental and higher-order resonant mode frequencies. The excitation-and-detection circuit drives each corresponding vibrating sensor at one of its resonant mode frequencies f1 or f2; the vibrational modes driven at the frequencies f1 and f2 are the same for each sensor. Compressive or tensile loads oppositely applied by the proof mass to the vibrating sensors cause a difference frequency Δf=f1−f2 to vary monotonically with acceleration of the apparatus along the sensing axis. The excitation-and-detection circuit includes at least one low-pass filter with a low-pass cut-off frequency fLP that is less than Δf.