Resonant Beam Blanker for High-Energy Particle Optics

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Solution Overview

Problem

Existing beam blankers face challenges in achieving high frequency operation at lower power and higher sensitivity, particularly when dealing with higher energy beams, as they require increased amplitude and dV/dt, which is difficult to achieve, especially in applications like Transmission Electron Microscopes where the beam energy is significantly higher than in conventional systems.

Innovation Solution

The beam blanker employs a resonant structure with a quality factor Q to amplify the deflection amplitude, using an LC network or waveguide coupled to an RF oscillator, generating an electric field that sweeps the beam over an aperture twice per period, allowing for higher frequency operation with lower power consumption and increased sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by stationary object

If conventional beam blankers are used for high energy beams, then beam blanking function is achieved, but power consumption increases and sensitivity decreases

Engineering Contradiction:
Improvepower consumptionVSAvoidblanking performance
Core Design Contradiction:
Use of energy by stationary objectVSReliability

Solution Approach 1:

The patent applies resonant oscillation of the electric field in the beam blanker. By tuning the blanking frequency to match the resonant frequency of the electron beam oscillations, the system achieves enhanced blanking performance with reduced power consumption. The resonant condition creates a standing wave pattern that maximizes the deflection effect at minimal energy input.

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The patent changes the operating parameters by utilizing the natural resonant frequency of the electron beam rather than applying arbitrary high-frequency blanking signals. This parameter optimization allows the system to achieve the same blanking effect with significantly lower power requirements while maintaining or improving sensitivity.

Inventive Principle:
Principle #35Parameter changes

2Loss of time

If higher frequency operation is achieved, then time resolution improves, but power requirements increase

Engineering Contradiction:
Improvetime resolutionVSAvoidpower requirements
Core Design Contradiction:
Loss of timeVSPower

Solution Approach 1:

The patent employs periodic blanking signals that are synchronized with the resonant oscillation period of the electron beam. This periodic action at the resonant frequency achieves high time resolution for studying ultra-fast phenomena while minimizing power consumption through constructive interference of the oscillating fields.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

By exploiting the natural vibrational resonance of the electron beam, the system achieves high-frequency operation necessary for femtosecond time resolution without requiring excessive power. The resonant vibration amplifies the blanking effect naturally, reducing the need for high-power driving signals.

Inventive Principle:
Principle #18Mechanical vibration

3Adaptability or versatility

If beam energy is increased, then application versatility improves, but required deflection voltage increases

Engineering Contradiction:
Improveapplication rangeVSAvoiddeflection voltage
Core Design Contradiction:
Adaptability or versatilityVSForce

Solution Approach 1:

The patent optimizes the blanking frequency parameter to match the resonant frequency, which scales with beam energy. This allows the system to maintain effective blanking performance across a wide range of beam energies without requiring proportionally higher deflection voltages, thereby extending application versatility.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The resonant oscillation mechanism provides natural amplification of the deflection effect. Even at higher beam energies where more force would normally be required, the resonant condition creates constructive interference that enhances the deflection voltage produced by the blanking fields, reducing the power penalty associated with higher energy beam operation.

Inventive Principle:
Principle #18Mechanical vibration

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient high-frequency beam blanking with reduced power requirements and enhanced sensitivity, suitable for applications like Transmission Electron Microscopes, enabling the study of ultra-fast phenomena on a femtosecond scale with improved brightness and time resolution.

Implementation Method 1

the electric field is generated by a resonant structure with a resonant frequency f, the resonant structure equipped to generate an electric field that sweeps the beam over the aperture twice per period of the frequency f

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

means for generating an electric field perpendicular to said axis, the electric field for deflecting the charged particles

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 3

By making the deflection means part of a resonant structure, the amplitude of the deflector is amplified by a factor Q, in which Q is the quality factor of the resonant structure

Methodology Applied
Scientific EffectResonance amplification: Resonance

Implementation Method 4

means for generating an electric field perpendicular to said axis, the electric field for deflecting the charged particles

Methodology Applied
Scientific EffectLorentz force: Lorentz Force

Data Source

PatentUS8569712B2Beam blanker for interrupting a beam of charged particles
Publication Date: 2013.10.29 FEI CO
  • US8569712B2 patent drawing
  • US8569712B2 patent drawing
  • US8569712B2 patent drawing

AI summary

The invention relates to an electrostatic beam blanker for a particle-optical apparatus, in which the blanker is used to generate a train of pulses with a fixed repetition rate. Such pulse trains with a sub-picosecond pulse length are for example used in the study of chemistry in the femtosecond scale.The beam blanker according to the invention uses a resonant structure, as a result of which the voltage is amplified by the quality factor Q of the resonant structure. During each zero-crossing of the signal, thus twice per period of the resonant frequency, the beam is transmitted, and the beam is blanked during the rest of the time. In a preferred embodiment the resonant structure comprises a transmission line. Impedance matching of signal source and resonant structure may be performed by tuning stubs.