Resonant Coil Antenna Layout for Low-Impurity Plasma Generation
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Solution Overview
Problem
Existing plasma generating devices introduce impurities into active species during plasma discharge due to collisions with dielectric tubes, necessitating a design that reduces these impurities.
Innovation Solution
A plasma generating device with multiple operation modes and an antenna module comprising unit coils and capacitors, allowing for frequency-specific plasma discharge to minimize impurity introduction, utilizing first and second power supplies with different frequency ranges and resonance frequencies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If plasma discharge is performed using conventional antenna design, then active species are generated, but impurities are introduced due to collisions with dielectric tube
Solution Approach 1:
The antenna is divided into multiple unit coils (first unit coil, second unit coil, etc.) wound around the dielectric tube at different positions. This segmentation allows selective activation of different coil sections to optimize plasma generation while minimizing impurity introduction from dielectric tube collisions.
Solution Approach 2:
The system employs multiple power supplies with different frequency ranges (first frequency range for first mode, second frequency range for second mode) to change the operating parameters of the antenna. By adjusting frequency and power distribution across different unit coils, the plasma discharge characteristics are optimized to reduce impurity generation while maintaining active species production.
2Productivity
If multiple operation modes with different frequencies are implemented, then plasma discharge efficiency is improved, but device complexity increases
Solution Approach 1:
The antenna module is designed with multiple unit coils that can be activated in different combinations and modes. The same physical antenna structure serves multiple functions: it can operate in first mode using first frequency range for certain plasma generation tasks, and switch to second mode using second frequency range for different tasks, making the antenna universal for various plasma processing requirements.
Solution Approach 2:
Multiple unit coils are combined into a single integrated antenna module around the dielectric tube. The first unit coil, second unit coil, and additional unit coils are electrically connected and mechanically integrated, allowing them to function as a unified system that can be controlled in different modes through the power supply configuration rather than requiring separate antenna structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively reduces impurities in active species, enabling its use in various environments while maintaining efficient plasma generation.
Implementation Method 1
the first frequency corresponds to a first resonance frequency that is determined according to the first inductance and the first capacitance
Implementation Method 2
the antenna module induces a first plasma discharge based on a power signal having a first frequency
Implementation Method 3
a dielectric tube; and an antenna module including a first unit coil wound around the dielectric tube
Data Source
AI summary
According to one embodiment of the present disclosure, there can be provided a plasma generating device for performing plasma discharge, the plasma generating device having multiple operation modes including a first mode and a second mode, and including: a first power supply capable of changing a frequency within a first frequency range; a second power supply capable of changing a frequency within a second frequency range that is at least partially different from the first frequency range; a dielectric tube; and an antenna module including a first unit coil wound around the dielectric tube at least one time, a second unit coil wound around the dielectric tube at least one time, and a first capacitor connected in series between the first unit coil and the second unit coil.