Resonant Hydrogen Gas Sensor for Precise Leak Detection
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Solution Overview
Problem
The challenge in the field of electromobility is the need for safe and reliable detection of hydrogen gas leaks outside hydrogen storage tanks and fuel cell systems in vehicles, given hydrogen's explosive reaction with oxygen.
Innovation Solution
A gas sensor comprising a substrate, a semiconductor-based sensor element with a resonant element, and a cover, designed to detect hydrogen by measuring shifts in resonance frequency, optionally integrated with additional sensors for pressure and temperature, produced using semiconductor-based layers and wafer bonding techniques.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a resonant element is integrated into the semiconductor-based sensor element, then measurement precision for gas density and viscosity is improved, but device complexity increases
Solution Approach 1:
The patent combines the resonant element directly into the semiconductor-based sensor element, merging two functional components (resonant element and sensor element) into a single integrated structure. This integration allows the resonant element to serve dual purposes: maintaining structural integrity of the sensor while providing resonance-based measurements of gas density and viscosity, thereby improving measurement precision without proportionally increasing device complexity
Solution Approach 2:
The resonant element integrated into the semiconductor-based sensor element serves multiple functions simultaneously: it acts as both a structural component of the sensor and a measurement component for detecting gas density and viscosity through resonance frequency changes. This multi-functionality allows a single component to address multiple measurement needs, improving overall sensor capability while minimizing additional complexity
2Reliability
If the substrate and cover are designed with openings for gas passage, then detection reliability of hydrogen leaks is improved, but manufacturing precision requirements increase
Solution Approach 1:
The sensor housing is segmented into distinct components (substrate and cover) with dedicated openings for gas passage. This segmentation allows each component to be manufactured and tested separately, with standardized opening positions that can be precisely controlled during individual manufacturing processes, thereby maintaining high detection reliability while managing manufacturing precision requirements through modular construction
Solution Approach 2:
The openings in the substrate and cover serve as intermediary channels that facilitate controlled gas flow to the sensor element. These openings are designed with specific dimensions and positions to ensure reliable hydrogen leak detection, and their standardized geometry allows for precise manufacturing using conventional techniques, balancing detection reliability with manufacturability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor effectively detects hydrogen leaks, providing real-time monitoring and enhancing safety by measuring gas density, viscosity, and pressure, suitable for integration in fuel cell systems and vehicles.
Implementation Method 1
a first semiconductor-based sensor element (2) for determining the density and/or viscosity of a gas, which is arranged above the substrate (1) and has a resonant element (2A)
Data Source
AI summary
A method for producing a gas sensor includes providing a substrate; depositing a semiconductor-based layer on the substrate; producing a first sensor element in the semiconductor-based layer, the first sensor element forming a resonant element; and mounting a cover on the first sensor element, where at least one of the substrate or the cover includes an opening to allow a passage of a gas to the first sensor element