Resonant Membrane Gas Sensor CO2 Cross-Sensitivity Compensation

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Solution Overview

Problem

Existing CO2 sensors face challenges in accurately measuring carbon dioxide levels in ambient conditions due to cross-sensitivities with gas pressure, temperature, and humidity, which affect the resonance frequency and quality factor, making it difficult to detect small frequency shifts and achieving high accuracy in real-world environments.

Innovation Solution

A device comprising a first sealed membrane pressure sensor and a second unsealed oscillating membrane gas sensor, with a mixer calculating the difference in frequency measurements to output a carbon dioxide measurement, while using a heater to cycle temperature and account for humidity effects, allowing for high-accuracy CO2 detection by mitigating cross-sensitivities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a resonant membrane gas sensor is used to detect CO2 concentration, then the sensitivity to CO2 can be improved, but cross-sensitivities to gas pressure, temperature, and humidity will worsen the measurement accuracy

Engineering Contradiction:
ImproveCO2 detection accuracyVSAvoidcross-sensitivities to pressure, temperature, and humidity
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The device is segmented into two independent sensor systems: a sealed pressure sensor and an unsealed gas sensor. Each sensor measures different physical quantities independently, allowing the system to separate and compensate for cross-sensitivity effects by processing the combined data from both sensors.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A processor acts as an intermediary that receives frequency measurements from both the sealed pressure sensor and the unsealed gas sensor. The processor calculates the difference between these measurements to derive CO2 concentration, effectively using the sealed sensor as a reference to eliminate environmental interference.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the resonance frequency is used to measure CO2 concentration, then the response to CO2 can be improved, but the quality factor will decrease due to ambient conditions

Engineering Contradiction:
Improvefrequency shift detectionVSAvoidquality factor in ambient conditions
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

Instead of trying to maintain a high quality factor in the unsealed sensor despite ambient conditions, the invention inverts the approach by using a sealed sensor with high Q as a reference. The measurement is derived from the difference between the two sensors, turning the quality factor limitation into a solvable problem through differential measurement.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The system changes the operational parameters of the two sensors differently: the sealed pressure sensor operates in a controlled environment maintaining high Q, while the unsealed gas sensor operates in ambient conditions with lower Q. This parameter differentiation allows each sensor to optimize its function for its specific operating conditions.

Inventive Principle:
Principle #35Parameter changes

3Stability of the object's composition

If a sealed membrane pressure sensor is used to compensate for pressure effects, then the stability against pressure changes can be improved, but the ability to detect gas composition changes will be lost

Engineering Contradiction:
Improvepressure stabilityVSAvoidgas composition detection
Core Design Contradiction:
Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The device achieves multi-functionality by combining two sensors with different characteristics: the sealed pressure sensor provides pressure stability and compensation, while the unsealed gas sensor provides gas composition detection. Together, they deliver both pressure stability and gas composition detection capabilities that neither sensor could achieve alone.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The solution moves from a single-dimension measurement (using one sensor for both pressure and gas detection) to a two-dimension measurement approach. The sealed sensor measures pressure in one dimension while the unsealed sensor measures gas composition in another dimension, allowing independent optimization of each function.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise detection of CO2 levels with improved frequency resolution, capable of measuring small changes in CO2 concentration despite ambient conditions, by compensating for pressure, temperature, and humidity influences, thereby enhancing the accuracy of CO2 sensing.

Implementation Method 1

a second unsealed oscillating membrane gas sensor (200) that measures a resonance frequency of a gas mixture

Methodology Applied
Scientific EffectResonance frequency detection: Resonance

Implementation Method 2

taking advantage of the availability of accurate sensing of frequency by being sensitive to the average molar mass of a gas mixture, where the molar mass is reflected in the resonance frequency of the device

Methodology Applied
Scientific EffectMolar mass sensing:

Implementation Method 3

a first sealed membrane pressure sensor (250) that measures air pressure

Methodology Applied
Scientific EffectPressure-induced frequency shift:

Implementation Method 4

using a heater to cycle temperature and account for humidity effects

Methodology Applied
Scientific EffectTemperature cycling:

Implementation Method 5

a mixer accepting as input a first frequency measurement output from the first sensor and a second frequency measurement output from the second sensor, outputting the difference of the first frequency measurement and the second frequency measurement

Methodology Applied
Scientific EffectDifferential frequency measurement:

Data Source

PatentEP3191830B1Resonant membrane gas sensor and non-transitory machine-readable storage medium therefore
Publication Date: 2018.10.03 AMS INTERNATIONAL AG
  • EP3191830B1 patent drawingFigure 1
  • EP3191830B1 patent drawingFigure 2A
  • EP3191830B1 patent drawingFigure 2B

AI summary

A gas sensor (200) comprises a cavity (214) and is configured to sense at least one of a molar mass, a density and a viscosity of a gas mixture in the cavity (214). Moreover, various exemplary embodiments relate to a device to measure carbon dioxide (CO2) levels, including a first oscillator group (520) comprising a first sensor (250) to measure air pressure, where the first sensor (250) comprises a first sealed membrane (252), and where the first sealed membrane (252) overlays a sealed first cavity (258); a second oscillator group (522) including a second sensor (200) to measure the resonance frequency (f2) of a second unsealed oscillating membrane (210), and where the second unsealed membrane (210) overlays a second cavity (214) in contact with the air outside of the second sensor (200).