Resonant Sensor Strain Isolation via Segmented Fixing
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Solution Overview
Problem
Resonant sensor devices face measurement errors due to strain caused by thermal stress and external forces, which are transmitted to the supporting portions and affect the accuracy of acceleration detection.
Innovation Solution
The resonant sensor device is designed with a connection portion, intermediate fixing portion, and supporter separated from the base, where the connection portion's maximum dimension in one direction is smaller than the supporter's, reducing the strain transmission path and allowing movement only in the sensitivity axis direction, thereby inhibiting swinging motions and enhancing measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the detection substrate is fixed directly to the base, then the structural simplicity is improved, but thermal stress and external force strain are transmitted to the supporting portion causing measurement errors
Solution Approach 1:
The patent divides the fixing structure into multiple segments: a connection portion that connects the detection substrate to the base, and an intermediate fixing portion that fixes the supporter. This segmentation isolates the supporting portion from direct strain transmission paths, preventing thermal stress and external forces from reaching the resonator while maintaining structural integrity.
Solution Approach 2:
The patent introduces an intermediate fixing portion as a mediator between the supporter and the base. This intermediate structure acts as a buffer that prevents direct transmission of thermal stress and external forces to the supporting portion, while still providing necessary mechanical support and positioning.
2Stability of the object's composition
If the connection portion has the same dimensions as the supporter, then the structural symmetry is improved, but strain transmission to the resonator increases
Solution Approach 1:
The patent deliberately creates an asymmetric configuration where the connection portion has smaller dimensions than the supporter. This asymmetry is functional rather than arbitrary - the reduced size of the connection portion minimizes its moment of inertia and reduces the transmission path for strain, preventing resonator interference while the larger supporter provides adequate structural support.
3Stability of the object's composition
If the entire fixing portion is fixed to the damping member, then the fixing stability is improved, but the strain transmission path is lengthened affecting resonator accuracy
Solution Approach 1:
The patent extracts the fixing function from the entire detection substrate and concentrates it specifically at the intermediate fixing portion. By taking out only the necessary fixing points and leaving other areas free, the patent prevents strain transmission to the supporting portion while maintaining adequate fixing stability for proper device operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration maximizes the accuracy of acceleration measurements by preventing strain from being transmitted to the resonator, reducing measurement errors and maintaining high sensitivity.
Implementation Method 1
a resonant sensor device includes a weight having a predetermined weight, a spring portion supporting the weight, and a resonator embedded in the spring portion, and is a device that measures acceleration by detecting a change in resonance frequency of the resonator
Implementation Method 2
a spring portion supporting the weight, and is a device that measures acceleration by detecting a change in resonance frequency of the resonator caused by, for example, a strain of the spring portion that is generated in proportion to an acceleration
Data Source
Figure 1A~1B
Figure 2
Figure 3~4
AI summary
A resonant sensor device includes a base and a detection substrate. The detection substrate includes a movable portion configured to move in a first direction, a supporter includes one or more supporting portions which extend in a direction along an intersecting plane intersecting the first direction, an intermediate fixing portion which is connected to the movable portion via the supporter, a connection portion which connects a mounting portion fixed to the base to the intermediate fixing portion in a second direction that is one direction along the intersecting plane, and a resonator at least partially embedded in the one or more supporting portions. The maximum dimension of the connection portion in a third direction orthogonal to the second direction in the intersecting plane is smaller than a maximum dimension of the supporter in the third direction.