Resonant Sensor Uniform Mass Sensitivity

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Solution Overview

Problem

Current microfabricated resonant mass sensors have spatially non-uniform mass sensitivity, making them less practical for measuring the mass of single or few target entities, as the mass sensitivity varies significantly across the cantilever beam structure, reducing their effectiveness in accurately determining cell mass and growth rate.

Innovation Solution

A microfabricated resonant sensor with a suspended platform supported by three or more tethers, exhibiting uniform vibration amplitude across the measuring surface, which maintains higher mass sensitivity regardless of the entity's position, achieved through a unique design with a folded geometry and materials like semiconductors, metals, and piezoelectric materials, allowing for precise measurement of cell mass and growth rate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a cantilever beam structure is used for miniaturization, then mass sensitivity is improved, but spatial uniformity of mass sensitivity deteriorates

Engineering Contradiction:
Improvemass sensitivityVSAvoidspatial uniformity of mass sensitivity
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The sensor structure is divided into multiple identical cantilever beams (typically three or more) arranged in an array. Each cantilever is segmented into a uniform section and a tip section, with the uniform section providing consistent mass sensitivity across its length. This segmentation allows the sensor to achieve high mass sensitivity while maintaining spatial uniformity through the repeated modular structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different sections of the cantilever beam are designed with different geometric properties to serve different functions. The uniform section has constant cross-section for consistent mass sensitivity, while the tip section may have varying geometry for enhanced sensitivity or functional purposes. This local differentiation resolves the contradiction by optimizing each region for its specific role.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If mass attachment is limited to the cantilever tip, then mass sensitivity is improved, but device complexity and ease of operation deteriorate

Engineering Contradiction:
Improvemass sensitivityVSAvoidease of target attachment
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The uniform section of each cantilever beam serves multiple functions: it provides the primary mass sensitivity for detection, acts as a support structure, and serves as a valid attachment site for target masses. This multi-functionality eliminates the need to restrict attachment to the tip, making the sensor more versatile and easier to use while maintaining measurement precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The sensor array extends the attachment space from a single-point tip location to a two-dimensional uniform section area. This dimensional expansion allows target entities to be attached at multiple locations along the cantilever length, providing operational flexibility while the array configuration maintains overall measurement precision through redundant sensing elements.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor provides uniform mass sensitivity, enabling accurate measurement of cell mass and growth rate with minimal variation, overcoming the limitations of traditional cantilever beam sensors by maintaining high sensitivity across the platform, facilitating precise biological and chemical sensing.

Implementation Method 1

MEMS-based resonant mass sensors have been extensively studied as biological and chemical sensors. These sensors measure a shift in the resonance frequency of the structure before and after the target attachment, where the shift can be used to calculate the mass of the target entity.

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

a piezoelectric material, allowing for precise measurement of cell mass and growth rate

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS9250113B2Cell mass measurement and apparatus
Publication Date: 2016.02.02 THE BOARD OF TRUSTEES OF THE UNIV OF ILLINOIS
  • US9250113B2 patent drawing
  • US9250113B2 patent drawing
  • US9250113B2 patent drawing

AI summary

Provided herein are sensors and methods for determining properties of single cells, such as cell mass. Sensors disclosed herein include resonant sensors having a suspended platform designed to exhibit a uniform vibration amplitude. Methods are also disclosed for measuring changes in cell mass, changes in cell number, changes in cell viscosity and changes in cell elasticity.