Resonant Switching Power Supply for LED Test Device

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Solution Overview

Problem

Existing test devices for substrates with image sensors face challenges in suppressing power loss and accurately adjusting the amount of light for testing.

Innovation Solution

A test device with a mounting table and an irradiation device that includes a light emitting section with multiple LEDs, a fixed power supply using switching power supplies that perform resonance switching, and a constant current section with parallel first and second constant current sources to adjust current with high accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a single constant current source is used to adjust current, then the device complexity is reduced, but the manufacturing precision of current adjustment is insufficient

Engineering Contradiction:
Improvecurrent adjustment precisionVSAvoidconstant current source configuration
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The constant current source is divided into two independent sources: a first constant current source for coarse adjustment and a second constant current source for fine adjustment. This segmentation allows each source to operate at optimal resolution levels, achieving high overall precision without requiring a single overly complex high-precision source.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a dual-resolution dimension to current adjustment by parallelizing two constant current sources with different precision levels. This transforms a single-dimensional adjustment problem into a two-dimensional solution space where coarse and fine adjustments can be independently optimized and combined.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Loss of energy

If conventional power supply is used in the irradiation device, then the device complexity is reduced, but the power loss increases

Engineering Contradiction:
Improvepower lossVSAvoidpower supply configuration
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent replaces conventional linear power supply mechanisms with switching power supplies that utilize resonance phenomena. This substitution transitions from a continuous analog power delivery system to a switched-mode system, significantly reducing power loss through efficient energy transfer and minimal dissipative heating.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operating parameters of the power supply by implementing switching operation at resonant frequencies. This parameter change enables the system to operate in a high-efficiency regime where power loss is minimized through synchronized switching and resonant energy transfer, rather than continuous linear regulation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses power loss and allows for precise adjustment of light intensity over a wide range, enhancing the accuracy of substrate testing.

Implementation Method 1

The fixed power supply includes a plurality of switching power supplies configured to perform switching using a resonance phenomenon

Methodology Applied
Scientific EffectResonance phenomenon: Resonance

Data Source

PatentUS20250203730A1Test device and test method
Publication Date: 2025.06.19 TOKYO ELECTRON LTD
  • US20250203730A1 patent drawing
  • US20250203730A1 patent drawing
  • US20250203730A1 patent drawing

AI summary

A test device includes a mounting table configured to mount a substrate; an irradiation device configured to irradiate the substrate mounted on the mounting table with test light; a tester configured to test the substrate that has received the test light. The irradiation device includes a light emitting section in which a plurality of LEDS are connected; a fixed power supply configured to output power to be supplied to the light emitting section; and a constant current section provided between the light emitting section and the fixed power supply. The fixed power supply includes a plurality of switching power supplies configured to perform switching using a resonance phenomenon. The constant current section includes a first constant current source and a second constant current source connected in parallel, the first constant current source being configured to receive the power of the plurality of switching power supplies and adjust a current in a first resolution, and the second constant current source being configured to receive the power of the plurality of switching power supplies and adjust a current in a second resolution less than the first resolution.