Microwave Resonator Array for Plasma Spatial Resolution
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Solution Overview
Problem
Current plasma processing chamber metrology is limited in measuring plasma properties such as electron density and temperature, and spatial variations, as existing probe technologies introduce significant perturbations and require multiple measurements to achieve spatial resolution.
Innovation Solution
The development of substrate-based resonator arrays that electromagnetically couple with antennas, allowing for real-time measurement of plasma parameters like electron density and temperature by detecting changes in resonance behavior, with a reduced perturbing volume and simultaneous spatially resolved measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If microwave probe plasma diagnostics are used to determine plasma properties, then plasma composition and other properties can be measured, but the probe itself changes the measured properties due to its relatively large probe volume, resulting in inaccurate measurements of processing conditions
Solution Approach 1:
The invention divides the plasma diagnostic function into multiple distributed resonators positioned at different locations within the plasma chamber. Each resonator is a small, localized sensing element that measures plasma properties at its specific position without significantly perturbing the overall plasma. This segmentation allows spatially resolved measurements while minimizing probe perturbation effects.
Solution Approach 2:
The invention replaces traditional microwave probe diagnostics with a resonator-based electromagnetic sensing system. Instead of using physical probes that directly interact with and perturb the plasma, the system uses resonators that couple electromagnetically to the plasma, detecting plasma properties through changes in resonance characteristics. This substitution eliminates the mechanical intrusion of probes while maintaining diagnostic capability.
2Measurement precision
If traditional probe architectures are used for plasma diagnostics, then plasma properties can be determined, but spatial resolution requires multiple measurements and time-consuming procedures
Solution Approach 1:
The invention implements spatial resolution by distributing multiple resonators at different positions within the plasma chamber. Each resonator independently measures plasma properties at its location, providing spatially resolved data simultaneously. This eliminates the need for time-consuming sequential measurements or probe scanning, as all spatial points are measured at once.
Solution Approach 2:
The resonator array enables continuous, simultaneous measurement of plasma properties at multiple spatial locations. All resonators operate concurrently to provide real-time spatially resolved plasma diagnostics, eliminating interruptions or sequential measurement steps that would otherwise be required to achieve the same spatial resolution.
3Productivity
If substrate-based resonator arrays are used for plasma diagnostics, then real-time measurement of plasma parameters with spatial resolution is achieved, but the device complexity increases compared to single probe systems
Solution Approach 1:
The invention integrates multiple resonators onto a single substrate, combining what would otherwise be separate diagnostic instruments into one unified device. The resonators share common support structures, mounting mechanisms, and signal processing infrastructure, reducing the overall system complexity compared to using multiple independent probe systems.
Solution Approach 2:
The resonator array substrate serves multiple functions simultaneously: it provides mechanical support for all resonators, establishes electromagnetic coupling between resonators and the plasma, provides a platform for signal routing and processing, and enables spatially resolved measurements. This multi-functionality reduces the need for separate components and simplifies the overall system architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate, real-time measurement of plasma properties during processing, providing a single-shot capability for spatially resolved quantities with reduced transmission line length, improving the understanding of plasma conditions within processing chambers.
Implementation Method 1
an antenna that is configured to electromagnetically couple with the resonator
Implementation Method 2
detecting changes in resonance behavior
Data Source
AI summary
Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, wherein the antenna is connected to a transmission line in the substrate.