Resonator Collective Board Wiring for Batch Frequency Adjustment
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Solution Overview
Problem
Existing resonance devices manufactured using MEMS technology require complex and time-consuming frequency adjustment processes due to the need for individual connection of probes to each device, leading to large and cumbersome adjustment apparatuses.
Innovation Solution
A resonance device and collective board design that includes extended wiring lines connecting multiple resonators on a single substrate, allowing for simultaneous energization and frequency adjustment before division into individual devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If frequency adjustment is performed after division into individual resonance devices, then each device can be adjusted independently, but the adjustment process becomes time-consuming and requires complex apparatus with many probes
Solution Approach 1:
Multiple resonance devices are kept connected on a single collective board during the frequency adjustment process, merging multiple adjustment operations into a single unified process. This allows all devices to be adjusted simultaneously using a single probe, eliminating the need to connect probes to each device individually and significantly reducing both adjustment time and apparatus complexity
Solution Approach 2:
The frequency adjustment is performed before the resonance devices are divided from the collective board. By conducting the adjustment operation in advance while devices are still connected, the patent enables efficient batch processing without requiring subsequent individual connections, thereby saving time and simplifying the overall manufacturing workflow
2Productivity
If frequency adjustment is performed before division, then adjustment can be done in batch, but many probes are needed to connect to each terminal simultaneously
Solution Approach 1:
The patent merges multiple adjustment operations into a single unified process by keeping devices connected on the collective board. Instead of using many probes to connect to each terminal simultaneously, a single probe can sequentially or simultaneously access multiple terminals through the shared electrical connection structure, dramatically reducing apparatus complexity while maintaining high productivity
Solution Approach 2:
The collective board structure provides universal electrical connection points that can serve multiple resonance devices simultaneously. A single probe interface can interact with multiple devices through the shared terminal structure, making the adjustment apparatus simpler while maintaining the capability to adjust all devices in batch, thus achieving multi-functionality with minimal equipment
3Measurement precision
If individual probe connection is used for each resonance device, then precise frequency adjustment is possible, but the process becomes cumbersome and time-consuming
Solution Approach 1:
The patent combines multiple adjustment operations into a single process while maintaining precision by performing adjustments on connected devices. The electrical connection structure ensures that each device receives the appropriate adjustment signal, and the resonator structure allows for precise frequency control even in the connected state, thus maintaining measurement precision while dramatically improving ease of operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates rapid and simplified energization and frequency adjustment of multiple resonance devices, reducing the complexity and size of the adjustment apparatus.
Implementation Method 1
a resonator that includes an upper electrode... a drive voltage to a resonator... resonant frequency
Data Source
AI summary
A resonance device is provided that includes a first substrate with a resonator having an upper electrode, a second substrate that is disposed such that a first surface faces the first substrate with the resonator therebetween, a first terminal that is disposed on a second surface of the second substrate and that is electrically connected to the upper electrode, a second terminal that is disposed on the second surface and that applies a reference electric potential to the resonator, and an extended wiring line that is connected to the first terminal electrically and that extends on the second surface to an outer edge.