Resonator Cavity Airtightness Detection Using Integrated Oscillation Circuits
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Solution Overview
Problem
Existing methods for inspecting the airtightness of packages containing piezoelectric elements require multiple devices and increase manufacturing costs and inspection time, as they necessitate measuring impedance before and after pressure reduction.
Innovation Solution
A resonator device with an integrated circuit that includes an oscillation circuit, memory circuit, and determination circuit, which compares output characteristics to determine airtightness within a cavity, eliminating the need for pressure reducing and impedance measuring devices by monitoring changes in current through the resonator element.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If impedance measurement before and after pressure reduction is used to inspect airtightness, then airtightness inspection accuracy is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines the airtightness inspection function with the existing resonator device by integrating an oscillation circuit, counter circuit, and determination circuit directly into the device. This merging eliminates the need for separate pressure reducing devices and impedance measuring devices, thereby reducing device complexity while maintaining inspection accuracy through continuous frequency and duty cycle monitoring
Solution Approach 2:
The resonator device performs self-inspection of its own airtightness by using its internal oscillation circuit to generate oscillation signals and internal counter circuits to measure frequency and duty cycle. The determination circuit then analyzes these parameters to detect leakage, allowing the device to inspect itself without requiring external inspection equipment
2Measurement precision
If impedance measurement before and after pressure reduction is used to inspect airtightness, then airtightness inspection accuracy is improved, but inspection time increases
Solution Approach 1:
The patent enables continuous monitoring of oscillation frequency and duty cycle parameters through the oscillation circuit and counter circuits. This continuous measurement approach allows for real-time detection of airtightness changes without requiring intermittent pressure reduction steps, thereby maintaining high inspection accuracy while significantly reducing the time required compared to traditional before-and-after measurement methods
Solution Approach 2:
The determination circuit is pre-configured with reference values for frequency and duty cycle parameters. During operation, the circuit continuously compares real-time measurements against these predetermined references, enabling immediate detection of airtightness degradation without requiring manual intervention or complex measurement sequences
3Measurement precision
If impedance measurement before and after pressure reduction is used to inspect airtightness, then airtightness inspection accuracy is improved, but manufacturing cost increases
Solution Approach 1:
The patent merges the airtightness inspection functionality into the resonator device itself by integrating the oscillation circuit, counter circuits, and determination circuit. This integration eliminates the need for separate external inspection equipment (pressure reducing devices and impedance measuring devices), thereby reducing manufacturing costs while maintaining accurate inspection capability through the device's own internal resources
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces the number of inspection man-hours and manufacturing costs while enabling accurate airtightness determination without additional equipment, allowing for efficient leak inspection post-mounting or environmental testing.
Implementation Method 1
a resonator element disposed at the first surface side... an oscillation circuit electrically coupled to the resonator element
Data Source
AI summary
A resonator device includes: a base including a semiconductor substrate; a resonator element; and a lid to be bonded to the base, the lid and the base forming a cavity for accommodating the resonator element. An integrated circuit is disposed at the semiconductor substrate, the integrated circuit including an oscillation circuit electrically coupled to the resonator element, a memory circuit configured to store a reference value of an output characteristic of the resonator element, and a determination circuit configured to compare a detection value of the output characteristic of the resonator element with the reference value and determine an airtight state inside the cavity based on a comparison result.