Resonator Cavity Formation With Surface Roughness Control
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Solution Overview
Problem
Conventional methods for manufacturing resonators face difficulties in controlling the surface roughness of the working region, which affects the performance and quality of the resonator.
Innovation Solution
A method involving substrate pretreatment to create a sacrificial material part with specific curved surfaces, followed by the formation and removal of a multilayer structure, including a lower electrode, piezoelectric layer, and upper electrode, to control the surface roughness and form a resonator with a special cavity structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional manufacturing methods are used for resonators, then the manufacturing process is simple, but the surface roughness of the working region cannot be controlled
Solution Approach 1:
The substrate undergoes pretreatment before the main manufacturing process to modify the reaction rate of specific regions. This preliminary action creates different reaction characteristics in the preset region versus other regions, enabling controlled surface roughness in the working region while maintaining a manageable manufacturing process
Solution Approach 2:
The substrate is divided into different regions with different properties: the preset region (working region) has a modified reaction rate for controlled surface roughness, while other regions maintain their original properties. This local differentiation allows precise control of surface roughness only where needed without complicating the entire manufacturing process
2Manufacturing precision
If a sacrificial material part is formed with smooth curved surfaces, then the surface roughness is improved, but the manufacturing process becomes more complex
Solution Approach 1:
The reaction rate parameter of the substrate is changed in the preset region through pretreatment, making it higher than in other regions. This parameter change enables the sacrificial material to form with smooth curved surfaces during oxidation, as the modified reaction kinetics favor uniform material formation and removal
Solution Approach 2:
Instead of using mechanical methods to create smooth curved surfaces on the sacrificial material, the patent uses chemical oxidation processes. The pretreated substrate's enhanced reaction rate allows the oxidation to naturally produce smooth curved surfaces through controlled chemical reactions, replacing complex mechanical machining with a simpler chemical process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for easier control of surface roughness in the resonator's working region, improving the resonator's performance and quality compared to conventional manufacturing techniques.
Implementation Method 1
Oxidation treatment is performed to the substrate in an oxidation atmosphere to obtain the sacrificial material part
Implementation Method 2
an acoustic wave that is vertically propagated may be generated between the upper and lower electrodes in the effective region, due to an inverse piezoelectric effect of the piezoelectric material
Data Source
AI summary
The disclosure relates to the technical field of semiconductors, and discloses a method for manufacturing a resonator. The method includes: a substrate is pretreated to change a preset reaction rate of a preset region part of the substrate, so that the preset reaction rate of the preset region part is higher than that of a region outside the preset region part; a preset reaction is performed to the substrate to form a sacrificial material part including an upper half part above an upper surface of the substrate and a lower half part below a lower surface of the substrate; a multilayer structure is formed on the sacrificial material part, and includes a lower electrode layer, a piezoelectric layer and an upper electrode layer from bottom to top; and the sacrificial material part is removed.