Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional RF technologies in mobile devices face limitations, leading to drawbacks in performance and complexity, particularly with the coexistence of new and legacy standards and increasing data rate requirements.

Innovation Solution

The development of a single crystal acoustic resonator or filter using wafer level technologies, involving metal electrodes with varying geometric areas and perimeter structures coupled with a piezoelectric layer, and ion implantations to enhance device performance metrics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional RF technology is used to support multiple standards, then device compatibility is improved, but device complexity increases

Engineering Contradiction:

Improvecompatibility with multiple standardsVSAvoidRF technology complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements a universal resonator structure that can operate across multiple RF standards (LTE, Wi-Fi, Bluetooth, etc.) by designing a single crystal resonator with adjustable frequency characteristics. The resonator uses a piezoelectric layer with metal electrodes configured to support broad frequency ranges, eliminating the need for multiple standard-specific components and reducing overall device complexity while maintaining multi-standard compatibility

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Reliability

If metal electrodes with varying geometric areas are used, then device performance is improved, but manufacturing complexity increases

Engineering Contradiction:

Improvedevice performanceVSAvoidfabrication structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by varying the geometric area of metal electrodes at different locations within the piezoelectric layer. Specific electrode regions have different areas optimized for their local functional requirements, such as enhancing acoustic wave generation in certain zones while improving energy confinement in others. This localized optimization improves overall device performance without requiring complete redesign of the entire electrode structure

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The electrode structure is segmented into multiple regions with different geometric areas, allowing independent optimization of each segment for specific performance metrics. The piezoelectric layer is also effectively segmented through the varied electrode configuration, enabling different regions to contribute differently to the overall acoustic resonance, thereby improving performance while maintaining a systematic fabrication approach

Inventive Principle:

Principle #1Segmentation

3Reliability

If perimeter structures are added around electrodes, then acoustic energy confinement is improved, but device complexity increases

Engineering Contradiction:

Improveacoustic energy confinementVSAvoidstructure configuration

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent introduces asymmetric perimeter structures surrounding the metal electrodes, where the boundary conditions are deliberately made non-uniform to better confine acoustic energy. These asymmetric structures create specific stress distributions that enhance the acoustic mode confinement without requiring symmetric geometries, thereby improving energy retention while using a relatively simple structural addition rather than complex multi-component systems

Inventive Principle:

Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves the performance of acoustic resonator devices by increasing their efficiency and adaptability to varying standards, addressing the limitations of conventional RF technologies.

Implementation Method 1

a piezoelectric layer overlying a substrate

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

Combined with specific dimensional ratios and ion implantations, such techniques can increase device performance metrics

Methodology Applied

Scientific EffectIon implantation: Ion Implantation

Data Source

PatentUS10979011B2Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications

Publication Date: 2021.04.13 AKOUSTIS TECHNOLOGIES CORP

AI summary

A method of manufacture for an acoustic resonator or filter device. In an example, the present method can include forming metal electrodes with different geometric areas and profile shapes coupled to a piezoelectric layer overlying a substrate. These metal electrodes can also be formed within cavities of the piezoelectric layer or the substrate with varying geometric areas. Combined with specific dimensional ratios and ion implantations, such techniques can increase device performance metrics. In an example, the present method can include forming various types of perimeter structures surrounding the metal electrodes, which can be on top or bottom of the piezoelectric layer. These perimeter structures can use various combinations of modifications to shape, material, and continuity. These perimeter structures can also be combined with sandbar structures, piezoelectric layer cavities, the geometric variations previously discussed to improve device performance metrics.