Silicon Resonator Cavity Roughness for Getter Gas Adsorption
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Solution Overview
Problem
In compact electronic devices, it is challenging to maintain a high gas adsorption capability of the getter material due to size constraints, which affects the stability of the resonator device's characteristics over time.
Innovation Solution
A resonator device design featuring a silicon base with a resonator element and a silicon lid with a recessed part having a getter layer with increased surface roughness, where the getter layer is formed using a Ti-Au metal layer to enhance gas adsorption without increasing the device's size, and the lid is bonded to the base using surface-activated bonding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the surface area of the storage metal film is increased to enhance gas adsorption capability, then the gas adsorption capability is improved, but the device size increases
Solution Approach 1:
The invention transitions from a flat two-dimensional storage metal film to a three-dimensional porous structure. The porous coating material provides internal surface area through its pore network, effectively increasing the gas adsorption area without expanding the device's external footprint. This dimensional transformation resolves the contradiction between adsorption capability and device size.
Solution Approach 2:
The invention employs a porous coating material as the storage metal film. The porous structure provides significantly higher specific surface area compared to a solid film of the same footprint. The pores allow gas molecules to access adsorption sites throughout the material volume, enhancing gas adsorption capability while maintaining a compact device form factor.
2Reliability
If a large surface area storage metal film is used to improve gas adsorption, then the gas adsorption capability is enhanced, but it becomes difficult to maintain in reduced-size electronic devices
Solution Approach 1:
By transforming the storage metal film from a planar structure to a porous three-dimensional structure, the invention achieves high surface area within a compact footprint. This allows the gas adsorption function to be maintained in reduced-size electronic devices, improving adaptability to compact design requirements.
Solution Approach 2:
The porous coating material enables high gas adsorption capability in a space-efficient manner. The porous structure provides extensive internal surface area that can be accommodated within the limited space of compact devices, making the technology adaptable to modern miniaturized electronic device designs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively increases the surface area of the getter layer, enhancing gas adsorption capability while maintaining a compact device size, thereby stabilizing the resonator device's performance and preventing vacuum deterioration over time.
Implementation Method 1
a getter layer which is arranged on the bottom surface of the recessed part, and which is provided with a gas adsorptive property
Implementation Method 2
a resonator element arranged on the first surface
Data Source
AI summary
A resonator device includes a base made of silicon and provided with a first surface and a second surface in a front-back relationship with each other, a resonator element arranged on the first surface, a lid which is made of silicon, which has a third surface arranged at the first surface side to be faced to the first surface, and a recessed part having a bottom surface and opening on the third surface, and the third surface of which is bonded to the first surface, and a getter layer which is arranged on the bottom surface of the recessed part, and which is provided with a gas adsorptive property, wherein the bottom surface of the recessed part is higher in surface roughness Ra than the third surface.