Resonator Frequency Tuning by Vibration-Arm Lid Collision
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Solution Overview
Problem
Conventional methods for adjusting the resonant frequency of resonance devices using laser irradiation often impair the piezoelectricity of the resonator due to high heat exposure.
Innovation Solution
A resonance device manufacturing method that involves forming a resonator with a vibration arm between upper and lower lids, where the resonant frequency is adjusted by exciting the vibration arm with a voltage and causing it to collide with the lids, thereby scraping off material to change its weight without applying heat loads that deteriorate piezoelectricity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If laser irradiation is used to adjust resonant frequency, then frequency adjustment is achieved, but piezoelectricity of the resonator is impaired due to high heat exposure
Solution Approach 1:
The patent replaces the thermal field (laser irradiation) with a mechanical field (vibration excitation). Instead of using laser heat to remove material, the invention uses mechanical vibration to cause the vibration arm to collide with and scrape against the lid, mechanically removing material to adjust frequency without thermal damage to the piezoelectric layer
Solution Approach 2:
The patent introduces an intermediary mechanism (vibration excitation and collision process) between the frequency adjustment goal and the material removal action. The vibration arm acts as an intermediary that transfers mechanical energy to scrape material from the lid, mediating the frequency adjustment process without direct thermal contact with the resonator
2Manufacturing precision
If material is removed from vibration arm to adjust frequency, then resonant frequency is precisely adjusted, but piezoelectricity is deteriorated by heat
Solution Approach 1:
The patent substitutes mechanical scraping action for thermal material removal. The vibration arm is excited to vibrate and collide with the lid, mechanically scraping material from the lid surface. This mechanical process replaces laser-based thermal evaporation, achieving precise frequency adjustment without the harmful thermal effects that would damage the piezoelectric layer
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for precise adjustment of the resonant frequency without impairing the piezoelectricity of the resonator, preventing frequency variation and enabling easy attainment of the desired frequency.
Implementation Method 1
forming a resonator that includes vibration arm configured to bends and vibrate from the first electrode layer, the second electrode layer, and the piezoelectric film; adjusting a frequency of the resonator by exciting the vibration arm by applying a voltage between the first electrode layer and the second electrode layer
Implementation Method 2
causing a part of the vibration arm to collide with at least one of the lower lid and the upper lid
Data Source
AI summary
A method for adjusting a resonant frequency of a resonator without impairing piezoelectricity that includes preparing a lower lid; arranging a substrate with a lower surface that faces the lower lid and forming a first electrode layer, a piezoelectric film, and a second electrode layer on an upper surface of the substrate. Moreover, a vibration arm is formed that bends and vibrates from the first electrode layer, the second electrode layer, and the piezoelectric film and an upper lid faces the lower lid with the resonator interposed therebetween. The method further includes adjusting a frequency of the resonator before or after arranging the upper lid by exciting the vibration arm by applying a voltage between the first electrode layer and the second electrode layer and by causing a part of the vibration arm to collide with either or both of the lower lid and the upper lid.